@article{20.500.12210/53942,
	author = {Penaud, J. and Fruleux, F. and DUBOIS, Emmanuel},
	journal = {Applied Surface Science},
	title = {Transformation of hydrogen silsesquioxane properties with RIE plasma treatment for advanced multiple-gate MOSFETs},
	publisher = {Elsevier},
	year = {2006},
	volume = {253},
	pages = {395,399}
}