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Résultats 1-10 de 15
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A silicon beam-based microcantilever nanoelectrosprayer
Elsevier, 2007Autre communication scientifique (congrès sans actes - poster - séminaire...) -
Characterization of in-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology
21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, 2008, Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, IEEE, Piscataway, NJ, USA, 2008Communication dans un congrès avec actesAutre communication scientifique (congrès sans actes - poster - séminaire...)texte intégral -
A new four states high deflection low actuation voltage electrostatic MEMS switch for RF applications
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008, 2008, Proceedings of the 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008, _, 2008 -
Silicon nano-ESI emitters for mass spectrometry : a mixed micromechanical and microfluidic design
14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, Proceedings of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, IEEE, Piscataway, NJ, USA, 2007 -
Sub-attolitre nanodroplet deposition using a silicon-based nanoelectrospray emitter tip
Elsevier, 2007Autre communication scientifique (congrès sans actes - poster - séminaire...) -
A snapshot of electrified nanodroplets undergoing Coulomb fission
American Institute of Physics, 2012Autre communication scientifique (congrès sans actes - poster - séminaire...)texte intégral -
Digital image correlation of metal nanofilms on SU-8 for flexible electronics and MEMS
IOP Publishing, 2011Autre communication scientifique (congrès sans actes - poster - séminaire...)texte intégral -
Optimization of ohmic contact and adhesion on polysilicon in MEMS-NEMS wet etching process
Elsevier, 2011Autre communication scientifique (congrès sans actes - poster - séminaire...) -
Investigation of the carbon nanotube AFM tip contacts : free sliding versus pinned contact
Institute of Physics, 2009Autre communication scientifique (congrès sans actes - poster - séminaire...)texte intégral -
CVD growth of carbon nanotubes at very low pressure of acetylene
Springer Verlag, 2007Autre communication scientifique (congrès sans actes - poster - séminaire...)texte intégral