Proposal for an integrated silicon-photonics ...
Document type :
Compte-rendu et recension critique d'ouvrage
DOI :
Title :
Proposal for an integrated silicon-photonics terahertz gas detector using photoacoustics
Author(s) :
Verstuyft, Mattias [Auteur]
Universiteit Gent = Ghent University = Université de Gand [UGENT]
Akiki, Elias [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Walter, Benjamin [Auteur]
Vmicro SAS
Faucher, Marc [Auteur]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lampin, Jean-Francois [Auteur]
Photonique THz - IEMN [PHOTONIQUE THZ - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Vanwolleghem, Mathias [Auteur]
Photonique THz - IEMN [PHOTONIQUE THZ - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Kuyken, Bart [Auteur]
Universiteit Gent = Ghent University = Université de Gand [UGENT]
Universiteit Gent = Ghent University = Université de Gand [UGENT]
Akiki, Elias [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Walter, Benjamin [Auteur]
Vmicro SAS
Faucher, Marc [Auteur]

Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lampin, Jean-Francois [Auteur]

Photonique THz - IEMN [PHOTONIQUE THZ - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Vanwolleghem, Mathias [Auteur]

Photonique THz - IEMN [PHOTONIQUE THZ - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Kuyken, Bart [Auteur]
Universiteit Gent = Ghent University = Université de Gand [UGENT]
Journal title :
Optics Express
Pages :
22424
Publisher :
Optical Society of America - OSA Publishing
Publication date :
2020
ISSN :
1094-4087
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
A design and multiphysical model is presented for an on-chip gas sensor that transduces terahertz gas absorption through sound generation into a mechanical motion that can be read out externally. The signal is triply ...
Show more >A design and multiphysical model is presented for an on-chip gas sensor that transduces terahertz gas absorption through sound generation into a mechanical motion that can be read out externally. The signal is triply enhanced by designing a structure that functions simultaneously as an optical, an acoustical and a mechanical resonator. The structure is made in high-resistivity silicon and can be fabricated using CMOS and MEMS fabrication technologies. The sensor is a purely passive element, so an external THz source and read-out are required. The chip has a footprint of 3 mm 2. A detection limit of 234 ppb of methanol for a source power of 1 mW and an integration time of 1 ms is predicted.Show less >
Show more >A design and multiphysical model is presented for an on-chip gas sensor that transduces terahertz gas absorption through sound generation into a mechanical motion that can be read out externally. The signal is triply enhanced by designing a structure that functions simultaneously as an optical, an acoustical and a mechanical resonator. The structure is made in high-resistivity silicon and can be fabricated using CMOS and MEMS fabrication technologies. The sensor is a purely passive element, so an external THz source and read-out are required. The chip has a footprint of 3 mm 2. A detection limit of 234 ppb of methanol for a source power of 1 mW and an integration time of 1 ms is predicted.Show less >
Language :
Anglais
Popular science :
Non
Source :
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