Title :

Proposal for an integrated silicon-photonics terahertz gas detector using photoacoustics

Author(s) :

Verstuyft, Mattias [Auteur]
Universiteit Gent = Ghent University [UGENT]
Akiki, Elias [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Walter, Benjamin [Auteur]
Vmicro SAS
Faucher, Marc [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lampin, Jean-Francois [Auteur]
Photonique THz - IEMN [PHOTONIQUE THz - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Vanwolleghem, Mathias [Auteur]
Photonique THz - IEMN [PHOTONIQUE THz - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Kuyken, Bart [Auteur]
Universiteit Gent = Ghent University [UGENT]

Journal title :

Optics Express

Pages :

22424

Publisher :

Optical Society of America - OSA Publishing

Publication date :

2020

ISSN :

1094-4087

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

A design and multiphysical model is presented for an on-chip gas sensor that transduces terahertz gas absorption through sound generation into a mechanical motion that can be read out externally. The signal is triply ...
Show more >A design and multiphysical model is presented for an on-chip gas sensor that transduces terahertz gas absorption through sound generation into a mechanical motion that can be read out externally. The signal is triply enhanced by designing a structure that functions simultaneously as an optical, an acoustical and a mechanical resonator. The structure is made in high-resistivity silicon and can be fabricated using CMOS and MEMS fabrication technologies. The sensor is a purely passive element, so an external THz source and read-out are required. The chip has a footprint of 3 mm 2. A detection limit of 234 ppb of methanol for a source power of 1 mW and an integration time of 1 ms is predicted.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL