On-chip carbide derived carbon films for ...
Document type :
Communication dans un congrès avec actes
Title :
On-chip carbide derived carbon films for high performance micro-supercapacitors
Author(s) :
Brousse, K. [Auteur]
Centre interuniversitaire de recherche et d'ingénierie des matériaux [CIRIMAT]
Huang, P. [Auteur]
Centre interuniversitaire de recherche et d'ingénierie des matériaux [CIRIMAT]
Pinaud, Sébastien [Auteur]
Laboratoire de physique et chimie des nano-objets [LPCNO]
Respaud, Marc [Auteur]
Laboratoire de physique et chimie des nano-objets [LPCNO]
Chaudret, Bruno [Auteur]
Laboratoire de physique et chimie des nano-objets [LPCNO]
Lethien, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Taberna, P-L. [Auteur]
Centre interuniversitaire de recherche et d'ingénierie des matériaux [CIRIMAT]
Simon, P. [Auteur]
Centre interuniversitaire de recherche et d'ingénierie des matériaux [CIRIMAT]
Centre interuniversitaire de recherche et d'ingénierie des matériaux [CIRIMAT]
Huang, P. [Auteur]
Centre interuniversitaire de recherche et d'ingénierie des matériaux [CIRIMAT]
Pinaud, Sébastien [Auteur]
Laboratoire de physique et chimie des nano-objets [LPCNO]
Respaud, Marc [Auteur]
Laboratoire de physique et chimie des nano-objets [LPCNO]
Chaudret, Bruno [Auteur]
Laboratoire de physique et chimie des nano-objets [LPCNO]
Lethien, Christophe [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Taberna, P-L. [Auteur]
Centre interuniversitaire de recherche et d'ingénierie des matériaux [CIRIMAT]
Simon, P. [Auteur]
Centre interuniversitaire de recherche et d'ingénierie des matériaux [CIRIMAT]
Conference title :
2016 IEEE Nanotechnology Materials and Devices Conference (NMDC)
City :
Toulouse
Country :
France
Start date of the conference :
2016-10-09
Publisher :
IEEE
English keyword(s) :
Capacitance
Carbon
Electrolytes
Nanofabrication
Nanoporous materials
Supercapacitors
thin films
Carbon
Electrolytes
Nanofabrication
Nanoporous materials
Supercapacitors
thin films
HAL domain(s) :
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
English abstract : [en]
The integration of high performance energy storage systems on silicon chips is necessary to support the development of portable electronic devices. Electrochemical double layer capacitors (or supercapacitors) are a good ...
Show more >The integration of high performance energy storage systems on silicon chips is necessary to support the development of portable electronic devices. Electrochemical double layer capacitors (or supercapacitors) are a good candidate for this purpose as they provide high power densities and long cycle life. Nevertheless, the improvement of the energy densities delivered by supercapacitors is required. High areal and volumetric capacitance values could be reached while using carbide-derived carbons (CDCs), thanks to their tunable nanoporous structure. The fabrication of interdigitated microsupercapacitors from chlorination of sputtered TiC films on silicon wafer is presented here. On-chip CDC film electrodes were successfully prepared and tested in aqueous electrolyte, delivering high volumetric capacitance of 410 F.cm -3 . Moreover, the use of ionic liquids/solvent mixtures provided larger potential windows, leading to high energy densities up to 90 μWh.cm -2 .Show less >
Show more >The integration of high performance energy storage systems on silicon chips is necessary to support the development of portable electronic devices. Electrochemical double layer capacitors (or supercapacitors) are a good candidate for this purpose as they provide high power densities and long cycle life. Nevertheless, the improvement of the energy densities delivered by supercapacitors is required. High areal and volumetric capacitance values could be reached while using carbide-derived carbons (CDCs), thanks to their tunable nanoporous structure. The fabrication of interdigitated microsupercapacitors from chlorination of sputtered TiC films on silicon wafer is presented here. On-chip CDC film electrodes were successfully prepared and tested in aqueous electrolyte, delivering high volumetric capacitance of 410 F.cm -3 . Moreover, the use of ionic liquids/solvent mixtures provided larger potential windows, leading to high energy densities up to 90 μWh.cm -2 .Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
Source :