Title :

Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor

Author(s) :

Bartoli, F. [Auteur]
Institut Jean Lamour [IJL]
Laboratoire Matériaux Optiques, Photonique et Systèmes [LMOPS]
Aubert, Thierry [Auteur]
Laboratoire Matériaux Optiques, Photonique et Systèmes [LMOPS]
Moutaouekkil, M. [Auteur]
Institut Jean Lamour [IJL]
Streque, J. [Auteur]
Institut Jean Lamour [IJL]
Pigeat, P. [Auteur]
Institut Jean Lamour [IJL]
Hage-Ali, S. [Auteur]
Institut Jean Lamour [IJL]
Boulet, P. [Auteur]
Institut Jean Lamour [IJL]
M'Jahed, H. [Auteur]
Institut Jean Lamour [IJL]
Bou Matar, Olivier [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Talbi, Abdelkrim [Auteur]
Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN [AIMAN-FILMS - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
M 'Jahed, H [Auteur]
Institut Jean Lamour [IJL]
Zhgoon, Sergei [Auteur]
Elmazria, O. [Auteur]
Institut Jean Lamour [IJL]

Conference title :

2017 IEEE SENSORS

City :

Glasgow

Country :

Royaume-Uni

Start date of the conference :

2017-10-29

Publisher :

IEEE

English keyword(s) :

ScAlN
Temperature sensor
SAW

HAL domain(s) :

Physique [physics]/Matière Condensée [cond-mat]/Science des matériaux [cond-mat.mtrl-sci]
Sciences de l'ingénieur [physics]/Matériaux
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique

English abstract : [en]

— Several SAW devices based on Sc 0.1 Al 0.9 N/Sapphire bilayer structures were fabricated using various wavelengths and film thicknesses. The acoustic velocity, electromechanical coupling coefficient and temperature ...
Show more >— Several SAW devices based on Sc 0.1 Al 0.9 N/Sapphire bilayer structures were fabricated using various wavelengths and film thicknesses. The acoustic velocity, electromechanical coupling coefficient and temperature coefficient of frequency (TCF) of each device was then measured and the results were compared with calculations using several sets of elastic, piezoelectric and dielectric constants available in the literature. We have shown that the accuracy of available constants is not enough to permit a reliable optimization and design of SAW devices for signal processing and sensors applications.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL