Microelectromechanical variable-bandwidth ...
Document type :
Autre communication scientifique (congrès sans actes - poster - séminaire...): Communication dans un congrès avec actes
Title :
Microelectromechanical variable-bandwidth if frequency filters with tunable electrostatical coupling spring
Author(s) :
Galayko, Dimitri [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Kaiser, Andreas [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Combi, Chantal [Auteur]
STMicroelectronics
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Kaiser, Andreas [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Combi, Chantal [Auteur]
STMicroelectronics
Conference title :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
City :
Kyoto
Country :
Japon
Start date of the conference :
2003-01-23
HAL domain(s) :
Sciences de l'ingénieur [physics]/Energie électrique
Sciences de l'ingénieur [physics]/Electronique
Sciences de l'ingénieur [physics]/Electromagnétisme
Sciences de l'ingénieur [physics]/Electronique
Sciences de l'ingénieur [physics]/Electromagnétisme
English abstract : [en]
This paper describes the theory, design and test of a novel architecture of highly-selective micromechanical filters employing electrostatically coupled resonators with floating or biased coupling electrodes. This original ...
Show more >This paper describes the theory, design and test of a novel architecture of highly-selective micromechanical filters employing electrostatically coupled resonators with floating or biased coupling electrodes. This original method avoids the use of mechanical coupling springs thus extending the potential of a given process to higher frequencies. It gives also the possibility to implement more complex filter architectures and to tune the coupling factor of resonators. Filters with 2.8 MHz and 10.6 MHz center frequency having tunable relative bandwidths of 0.025-0.17% have been built from pairs of clamped-clamped beam resonators. Special design techniques have been used to reduce parasitic capacitances on the coupling node.Show less >
Show more >This paper describes the theory, design and test of a novel architecture of highly-selective micromechanical filters employing electrostatically coupled resonators with floating or biased coupling electrodes. This original method avoids the use of mechanical coupling springs thus extending the potential of a given process to higher frequencies. It gives also the possibility to implement more complex filter architectures and to tune the coupling factor of resonators. Filters with 2.8 MHz and 10.6 MHz center frequency having tunable relative bandwidths of 0.025-0.17% have been built from pairs of clamped-clamped beam resonators. Special design techniques have been used to reduce parasitic capacitances on the coupling node.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
Source :