Title :

Optimization of electrodes design for PZT thin-film actuated membranes

Author(s) :

Casset, F. [Auteur]
Michaud, H. [Auteur]
Ricart, T. [Auteur]
Le Rhun, G. [Auteur]
Cueff, M. [Auteur]
Abergel, J. [Auteur]
Ancey, P. [Auteur]
STMicroelectronics [Crolles] [ST-CROLLES]
Faralli, D. [Auteur]
Devos, Arnaud [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fanget, S. [Auteur]
Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
Defay, E. [Auteur]

Conference title :

26th European Conference on Solid-State Transducers, Eurosensors XXVI

City :

Kraków

Country :

Pologne

Start date of the conference :

2012-09-09

Book title :

26th European Conference on Solid-State Transducers, Eurosensors XXVI

Publication date :

2012

English keyword(s) :

PZT
Actuator
Design

HAL domain(s) :

Physique [physics]

English abstract : [en]

This paper reports on the optimization of electrodes design for sol-gel Pb(Zr0.52, Ti0.48)O3 (PZT) thin-film actuated-membranes. PZT can be used in many actuator applications such as micro mirror, RF MEMS, inkjet or ...
Show more >This paper reports on the optimization of electrodes design for sol-gel Pb(Zr0.52, Ti0.48)O3 (PZT) thin-film actuated-membranes. PZT can be used in many actuator applications such as micro mirror, RF MEMS, inkjet or loudspeaker due to its strong piezoelectric properties. We aim to design membrane-based actuators with the optimum electrode dimensions allowing the largest membrane displacement under a given actuation voltage. We present in this paper measurement results, in good agreement with the finite element modeling, proving that an actuator area between 50 and 60% of the membrane area exhibits the highest deflection.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Non spécifiée

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL