A 45° silicon mirror for acoustic propagation ...
Type de document :
Compte-rendu et recension critique d'ouvrage
Titre :
A 45° silicon mirror for acoustic propagation parallel to the plane of the substrate
Auteur(s) :
Wang, S. [Auteur]
Carlier, Julien [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Campistron, Pierre [Auteur]
Xu, Wei Jiang [Auteur]
Debavelaere-Callens, Dorothée [Auteur]
Nongaillard, Bertrand [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Ndieguene, Assane [Auteur]
Zhao, X. [Auteur]
Carlier, Julien [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Campistron, Pierre [Auteur]
Xu, Wei Jiang [Auteur]
Debavelaere-Callens, Dorothée [Auteur]
Nongaillard, Bertrand [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Ndieguene, Assane [Auteur]
Zhao, X. [Auteur]
Titre de la revue :
Journal of Physics: Conference Series
Pagination :
012009-1-10
Éditeur :
IOP Science
Date de publication :
2011
ISSN :
1742-6596
Mot(s)-clé(s) en anglais :
Acoustics
Mirrors
Silicon oxides
Transducers
Wet etching
Mirrors
Silicon oxides
Transducers
Wet etching
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
The interest of a thin silicon oxide layer on a {110} silicon crystal planes used as 45° acoustical mirrors for reflection has been demonstrated. Passive mirror-like planes (groove depth ∼ 150 μm) were fabricated by wet ...
Lire la suite >The interest of a thin silicon oxide layer on a {110} silicon crystal planes used as 45° acoustical mirrors for reflection has been demonstrated. Passive mirror-like planes (groove depth ∼ 150 μm) were fabricated by wet chemical etching of (100) silicon. High frequency acoustical longitudinal waves were obtained thanks to thin film ZnO transducers on the bottom surface of the silicon wafer. 45° mirrors had been prepared on the top side of the wafer. The transmission signal was characterized between two transducers using two mirrors. The results of acoustical characterization show that thanks to a thin silicon oxide layer deposited on the mirror it is possible to improve the efficiency of the reflection of the longitudinal wave on the mirror by about one order of magnitude.Lire moins >
Lire la suite >The interest of a thin silicon oxide layer on a {110} silicon crystal planes used as 45° acoustical mirrors for reflection has been demonstrated. Passive mirror-like planes (groove depth ∼ 150 μm) were fabricated by wet chemical etching of (100) silicon. High frequency acoustical longitudinal waves were obtained thanks to thin film ZnO transducers on the bottom surface of the silicon wafer. 45° mirrors had been prepared on the top side of the wafer. The transmission signal was characterized between two transducers using two mirrors. The results of acoustical characterization show that thanks to a thin silicon oxide layer deposited on the mirror it is possible to improve the efficiency of the reflection of the longitudinal wave on the mirror by about one order of magnitude.Lire moins >
Langue :
Anglais
Vulgarisation :
Non
Source :
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- https://doi.org/10.1088/1742-6596/269/1/012009
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