Rigorous extraction tunability of Si-integrated Ba0.3Sr0.7TiO3 thin film up to 60 GHz

Ponchel, Freddy; Legier, Jean-François; Soyer, Caroline; Remiens, Denis; Midy, Jean; Lasri, Tuami; Guéguan, Guillaume

Document type :

Article dans une revue scientifique

DOI :

10.1063/1.3454772

Title :

Rigorous extraction tunability of Si-integrated Ba0.3Sr0.7TiO3 thin film up to 60 GHz

Author(s) :

Ponchel, Freddy [Auteur]
STMicroelectronics [Tours] [ST-TOURS]
Legier, Jean-François [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Soyer, Caroline [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Remiens, Denis [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Midy, Jean [Auteur]
STMicroelectronics [Tours] [ST-TOURS]
Lasri, Tuami [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Guéguan, Guillaume [Auteur]
STMicroelectronics [Tours] [ST-TOURS]

Journal title :

Applied Physics Letters

Pages :

252906-1-3

Publisher :

American Institute of Physics

Publication date :

2010

ISSN :

0003-6951

HAL domain(s) :

Physique [physics]

English abstract : [en]

400-nm-thick Ba0.3Sr0.7TiO3 thin films are deposited on high resistivity silicon by in situ radio frequency magnetron sputtering. Coplanar waveguides with 1µm slot width are designed, with accurate knowledge frequency ...
Show more >400-nm-thick Ba0.3Sr0.7TiO3 thin films are deposited on high resistivity silicon by in situ radio frequency magnetron sputtering. Coplanar waveguides with 1µm slot width are designed, with accurate knowledge frequency losses behavior, to determine ferroelectric thin-films properties up to 60 GHz. Permittivity, loss tangent, and tunability are extracted through measurements and home made finite element analysis. Tunability of 33% and 29%, with 30 V maximum applied voltage-electric field of 300 kV/cm3, are measured at 5 GHz and 60 GHz, respectively, while the dielectric losses evolve from 0.5% to 5%. A brief highlight is proposed about tunable silicon integrated quarter wavelength transformer potentialities for impedance matching.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Non spécifiée

Popular science :

Non

Collections :