Elaboration and test of high energy density ...
Document type :
Communication dans un congrès avec actes
Title :
Elaboration and test of high energy density magnetic micro-actuators for tactile display applications
Author(s) :
Streque, J. [Auteur]
Talbi, Abdelkrim [Auteur]
Viard, R. [Auteur]
Pernod, Philippe [Auteur]
Preobrazhensky, Vladimir [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Talbi, Abdelkrim [Auteur]

Viard, R. [Auteur]
Pernod, Philippe [Auteur]

Preobrazhensky, Vladimir [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
Eurosensors XXIII
City :
Lausanne
Country :
Suisse
Start date of the conference :
2009-09-06
Journal title :
Procedia Chemistry
Publisher :
_
Publication date :
2009
English keyword(s) :
MEMS
Micro-actuators
Microsystems
Magnetism
Magnetic actuation
Tactile display
Micro-actuators
Microsystems
Magnetism
Magnetic actuation
Tactile display
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
This study reports the elaboration and characterization of a 4x4 MEMS elastomeric membrane array with 2 mm resolution, driven by magnetic micro-actuation. The device is to be used for tactile display interfaces providing ...
Show more >This study reports the elaboration and characterization of a 4x4 MEMS elastomeric membrane array with 2 mm resolution, driven by magnetic micro-actuation. The device is to be used for tactile display interfaces providing sensations to the skin in Human-Computer Interactions.The magnetic micro-actuators include an elastomeric PDMS diaphragm that holds a samarium-cobalt micro-magnet and a miniature Copper coil. The device was first optimized using finite element analysis for different coil-magnet configurations. Magnetic micro-actuators were micro-fabricated and their performances were experimentally evaluated. Each micro-actuator provides forces around 4mN for 800mA RMS driving currents (power dissipation about 100mW).Show less >
Show more >This study reports the elaboration and characterization of a 4x4 MEMS elastomeric membrane array with 2 mm resolution, driven by magnetic micro-actuation. The device is to be used for tactile display interfaces providing sensations to the skin in Human-Computer Interactions.The magnetic micro-actuators include an elastomeric PDMS diaphragm that holds a samarium-cobalt micro-magnet and a miniature Copper coil. The device was first optimized using finite element analysis for different coil-magnet configurations. Magnetic micro-actuators were micro-fabricated and their performances were experimentally evaluated. Each micro-actuator provides forces around 4mN for 800mA RMS driving currents (power dissipation about 100mW).Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :
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