Title :

Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator

Author(s) :

Al Ahmad, Mahmoud [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Laboratoire d'analyse et d'architecture des systèmes [LAAS]
Loyez, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Rolland, Nathalie [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Plana, Robert [Auteur]
Laboratoire d'analyse et d'architecture des systèmes [LAAS]
Rolland, Paul-Alain [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Conference title :

37th European Microwave Conference, EuMC 2007

City :

Munich

Country :

Allemagne

Start date of the conference :

2007-10-09

Book title :

Proceedings of the 37th European Microwave Conference, EuMC 2007

Publisher :

_

Publication date :

2007

English keyword(s) :

Packaging
Voltage-controlled oscillators
Tuning
Capacitance
Piezoelectric actuators
Air gaps
Capacitors
Voltage
Frequency
Bandwidth

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, S eff , increases continuously ...
Show more >In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, S eff , increases continuously from 5 mum to 10.5 mum. Due to that the coupling capacitance is tuned from 0.22 pF to 0.1 pF, i.e. tuning ratio of 2.2. When employing in hybrid packaged tunable voltage-controlled oscillator, its oscillation frequency is tuned from 34.40 GHz to 36 GHz, tuning of 5% (absolute bandwidth tuning of 1.6 GHz).Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Non spécifiée

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL