Acoustical properties characterization of ...
Document type :
Communication dans un congrès avec actes
DOI :
Title :
Acoustical properties characterization of a composite made of SU-8 and nanoparticules for BioMEMS application
Author(s) :
Carlier, Julien [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Campistron, Pierre [Auteur]
Debavelaere-Callens, Dorothée [Auteur]
Soyer, Caroline [Auteur]
Nongaillard, Bertrand [Auteur]
Wang, S. [Auteur]
Zhao, X. [Auteur]

Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Campistron, Pierre [Auteur]

Debavelaere-Callens, Dorothée [Auteur]
Soyer, Caroline [Auteur]

Nongaillard, Bertrand [Auteur]

Wang, S. [Auteur]
Zhao, X. [Auteur]
Conference title :
Second ASA-EAA Joint Conference, ACOUSTICS'08
City :
Paris
Country :
France
Start date of the conference :
2008
Publisher :
_
Publication date :
2008
English keyword(s) :
Acoustic transducers
Lab-on-a-chip
BioMEMS
Physical quantities
Signal processing
Telecommunications engineering
Composite materials
Dielectric materials
Light sensitive materials
Lab-on-a-chip
BioMEMS
Physical quantities
Signal processing
Telecommunications engineering
Composite materials
Dielectric materials
Light sensitive materials
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
The photoresist SU‐8 (often used in microtechnology) has been acoustically characterized at the frequency of 1 GHz thanks to ZnO transducers. This material will be used to achieve acoustical matching between silicon and ...
Show more >The photoresist SU‐8 (often used in microtechnology) has been acoustically characterized at the frequency of 1 GHz thanks to ZnO transducers. This material will be used to achieve acoustical matching between silicon and water at this frequency and a gain of about 5 dB has been obtained using the combination of this material with a silicon oxyde layer. The acoustical characterization of a composite material made of this photoresist SU‐8 doped with nanoparticules (TiO2 for example) is also presented. The aim is to achieve matching layers with specific mechanical impedance around 5 MRay and depending on the nanoparticules concentration. The targeted application concerns the integration of high frequency ultrasonic transducer in Lab‐on‐Chip for biological cell characterization, especially adhesion properties or biological cells mechanical behaviour. The mechanical impedance and the attenuation of this composite material are characterized around 1 GHz thanks to a standing wave ratio method measuring S11 parameter and extracting the targeted parameters thanks to signal processing.Show less >
Show more >The photoresist SU‐8 (often used in microtechnology) has been acoustically characterized at the frequency of 1 GHz thanks to ZnO transducers. This material will be used to achieve acoustical matching between silicon and water at this frequency and a gain of about 5 dB has been obtained using the combination of this material with a silicon oxyde layer. The acoustical characterization of a composite material made of this photoresist SU‐8 doped with nanoparticules (TiO2 for example) is also presented. The aim is to achieve matching layers with specific mechanical impedance around 5 MRay and depending on the nanoparticules concentration. The targeted application concerns the integration of high frequency ultrasonic transducer in Lab‐on‐Chip for biological cell characterization, especially adhesion properties or biological cells mechanical behaviour. The mechanical impedance and the attenuation of this composite material are characterized around 1 GHz thanks to a standing wave ratio method measuring S11 parameter and extracting the targeted parameters thanks to signal processing.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :