Title :

A TRL-like calibration for tunable interdigitated BST varactors

Author(s) :

Burgnies, Ludovic [Auteur]
Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique [LEMCEL]
Vélu, Gabriel [Auteur]
Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique [LEMCEL]
Houzet, Gregory [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Blary, Karine [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Carru, Jean-Claude [Auteur]
Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique [LEMCEL]
Lippens, Didier [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Journal title :

IEEE Transactions on Instrumentation and Measurement

Pages :

1127-1132

Publisher :

Institute of Electrical and Electronics Engineers

Publication date :

2008

ISSN :

0018-9456

English keyword(s) :

Calibration
Binary search trees
Varactors
Permittivity measurement
Reflection
Capacitors
Ferroelectric films
Conformal mapping
Image retrieval
Transistors

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

We report on a de-embedding technique for measuring the reflection coefficients of comblike capacitors patterned on barium-strontium-titanate (BST) ferroelectric films. The technique is derived from the thru-reflect-line ...
Show more >We report on a de-embedding technique for measuring the reflection coefficients of comblike capacitors patterned on barium-strontium-titanate (BST) ferroelectric films. The technique is derived from the thru-reflect-line calibration technique and is combined with conformal mapping to retrieve the complex permittivity of BST thin films. The accuracy of the method is demonstrated over a broad frequency for 0.3-mum-thick Ba x Sr 1-x TiO 3 , with x = 0.5, in a paraelectric state, grown by a sol-gel technique. The samples are characterized up to 35 GHz and exhibit a constant permittivity of 245 plusmn 12%, which is in good agreement with the values deduced from propagation wave constants of BST transmission linesShow less >

Language :

Anglais

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL