Compact multilayer piezoresistive gauge ...
Type de document :
Communication dans un congrès avec actes
Titre :
Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids
Auteur(s) :
Bureau, Jean-Baptiste [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Titre de la manifestation scientifique :
14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07
Ville :
Lyon
Pays :
France
Date de début de la manifestation scientifique :
2007-06-10
Éditeur :
IEEE, Piscataway, NJ, USA
Date de publication :
2007
Mot(s)-clé(s) en anglais :
Strain measurement
Nonhomogeneous media
Piezoresistance
Capacitive sensors
Arm
Transducers
Force measurement
Liquids
Atomic force microscopy
Solid state circuits
Nonhomogeneous media
Piezoresistance
Capacitive sensors
Arm
Transducers
Force measurement
Liquids
Atomic force microscopy
Solid state circuits
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
This paper presents an original piezoresistive strain gauge architecture based on two polysilicon layers able to sense in-plane strain. These gauges are electrically isolated from the external environment in order to be ...
Lire la suite >This paper presents an original piezoresistive strain gauge architecture based on two polysilicon layers able to sense in-plane strain. These gauges are electrically isolated from the external environment in order to be used in liquids. The presented design is based on three optimization keypoints, which one of these allows the reduction of the beam width thus leading to an increased sensitivity in force. Design, modelling, fabrication and characterization have been investigated. An in-plane sensitivity of 30x10 -6 μN -1 has been obtained which is comparable to out of plane sensitivity, typically obtained with AFM cantileversLire moins >
Lire la suite >This paper presents an original piezoresistive strain gauge architecture based on two polysilicon layers able to sense in-plane strain. These gauges are electrically isolated from the external environment in order to be used in liquids. The presented design is based on three optimization keypoints, which one of these allows the reduction of the beam width thus leading to an increased sensitivity in force. Design, modelling, fabrication and characterization have been investigated. An in-plane sensitivity of 30x10 -6 μN -1 has been obtained which is comparable to out of plane sensitivity, typically obtained with AFM cantileversLire moins >
Langue :
Anglais
Comité de lecture :
Oui
Audience :
Internationale
Vulgarisation :
Non
Source :