ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ...
Type de document :
Communication dans un congrès avec actes
Titre :
ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSE
Auteur(s) :
Rollier, A.-S. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Faucher, Marc [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, D. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Faucher, Marc [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, D. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Titre de la manifestation scientifique :
DTIP 2006
Ville :
Stresa, Lago Maggiore
Pays :
Italie
Date de début de la manifestation scientifique :
2006-04
Titre de l’ouvrage :
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Éditeur :
TIMA Editions
Date de publication :
2006-04
Mot(s)-clé(s) en anglais :
MEMS pull-in effect dynamic response
Discipline(s) HAL :
Informatique [cs]/Architectures Matérielles [cs.AR]
Résumé en anglais : [en]
This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in ...
Lire la suite >This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in effect can be shifted beyond one third of the initial gap and even be eliminated when electrostatic actuators are operated in liquids. This should benefit to applications in microfluidics requiring either binary state actuation (e.g. pumps, valves) or continuous displacements over the whole gap (e.g. microtweezers). In dynamic mode, actuators like micro-cantilevers present a great interest for Atomic Force Microscopy (AFM) in liquids. As this application requires a good understanding of the cantilever resonance frequency and Q-factor, an analytical modeling in liquid environment has been established. The theoretically derived curves are validated by experimental results using a nitride encapsulated cantilever with integrated electrostatic actuation. Electrode potential screening and undesirable electrochemistry in dielectric liquids are counteracted using AC-voltages. Both experimental and theoretical results should prove useful in micro-cantilever design for AFM in liquids.Lire moins >
Lire la suite >This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in effect can be shifted beyond one third of the initial gap and even be eliminated when electrostatic actuators are operated in liquids. This should benefit to applications in microfluidics requiring either binary state actuation (e.g. pumps, valves) or continuous displacements over the whole gap (e.g. microtweezers). In dynamic mode, actuators like micro-cantilevers present a great interest for Atomic Force Microscopy (AFM) in liquids. As this application requires a good understanding of the cantilever resonance frequency and Q-factor, an analytical modeling in liquid environment has been established. The theoretically derived curves are validated by experimental results using a nitride encapsulated cantilever with integrated electrostatic actuation. Electrode potential screening and undesirable electrochemistry in dielectric liquids are counteracted using AC-voltages. Both experimental and theoretical results should prove useful in micro-cantilever design for AFM in liquids.Lire moins >
Langue :
Anglais
Comité de lecture :
Oui
Audience :
Internationale
Vulgarisation :
Non
Commentaire :
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/5920)
Source :
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- https://hal.archives-ouvertes.fr/hal-00189294/document
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- http://arxiv.org/pdf/0711.3321
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- https://hal.archives-ouvertes.fr/hal-00189294/document
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- https://hal.archives-ouvertes.fr/hal-00189294/document
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- document
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- dtip06244.pdf
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- 0711.3321
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