Stiction-controlled locking system for ...
Document type :
Communication dans un congrès avec actes
Title :
Stiction-controlled locking system for three-dimensional self-assembling microstructures : theory and experimental validation
Author(s) :
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Quévy, Emmanuel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Quévy, Emmanuel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
Design, Test, Integration and Packaging of MEMS/MOEMS 2001
City :
Cannes
Country :
France
Start date of the conference :
2001-04-25
Book title :
Proceedings of the SPIE - International Society for Optical Engineering, 4408
Publisher :
SPIE – The International Society for Optical Engineering, Bellingham, WA, USA
Publication date :
2001
English keyword(s) :
Stiction
SDA
self-assembly
locking system
modeling
SDA
self-assembly
locking system
modeling
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
The novelty of our study lies in the first controlled use of the phenomenon of stiction to lock three-dimensional self- assembled polysilicon microstructures. The stiction refers to the permanent adhesion of the microstructures ...
Show more >The novelty of our study lies in the first controlled use of the phenomenon of stiction to lock three-dimensional self- assembled polysilicon microstructures. The stiction refers to the permanent adhesion of the microstructures to adjacent surfaces. It can occur either during the final stage of the micromachining process, that is to say the releasing of the microstructural material, or after the packaging of the device, due to overrange input signals or electromechanical instability. As a result, we often regard stiction as a major failure issue in the MEMS field of research. This paper reports both the theory of our stiction-controlled locking system operation mode and the validation of our original concept through the stiction-locking of a 3-D self-assembled deviceShow less >
Show more >The novelty of our study lies in the first controlled use of the phenomenon of stiction to lock three-dimensional self- assembled polysilicon microstructures. The stiction refers to the permanent adhesion of the microstructures to adjacent surfaces. It can occur either during the final stage of the micromachining process, that is to say the releasing of the microstructural material, or after the packaging of the device, due to overrange input signals or electromechanical instability. As a result, we often regard stiction as a major failure issue in the MEMS field of research. This paper reports both the theory of our stiction-controlled locking system operation mode and the validation of our original concept through the stiction-locking of a 3-D self-assembled deviceShow less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :