Title :

Thermally actuated probe arrays for manipulation and characterization of individual bio-cell

Author(s) :

Kim, Beomjoon [Auteur]
Collard, Dominique [Auteur]
Lagouge, Matthieu [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conseil, F. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Conference title :

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems

City :

Boston, MA

Country :

Etats-Unis d'Amérique

Start date of the conference :

2003-06-08

Book title :

Proceedings of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03

Publisher :

IEEE, Piscataway, NJ, USA

Publication date :

2003

English keyword(s) :

Probes
Sensor arrays
Etching
Actuators
Biosensors
Fabrication
Optical sensors
Fluidics
Force measurement
Electric variables measurement

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

We introduce a new concept of thermal micro-actuators combined with electrical sensor device to capture and characterize individual living bio-cell. In our micro fabricated device, cantilevers integrated with sensing part ...
Show more >We introduce a new concept of thermal micro-actuators combined with electrical sensor device to capture and characterize individual living bio-cell. In our micro fabricated device, cantilevers integrated with sensing part (surface micro-machined poly-silicon) and actuation using the difference of the thermal expansion coefficients between poly-Si and transparent thick polymer (SU-8), are built from a flow channel on the substrate. This paper deals with the detail fabrication, actuation of device and the simulation results for our bimorph probe arrays. The motion of the actuated device is well coincident with the calculated value.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL