Modeling of failure mechanisms for optimized ...
Type de document :
Communication dans un congrès avec actes
Titre :
Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches
Auteur(s) :
Millet, Olivier [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Titre de la manifestation scientifique :
12th International Conference on Solid-State Sensors
Ville :
Boston
Pays :
Etats-Unis d'Amérique
Date de début de la manifestation scientifique :
2003-06-08
Titre de l’ouvrage :
Proceedings of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03
Éditeur :
IEEE, Piscataway, NJ, USA
Date de publication :
2003
Mot(s)-clé(s) en anglais :
Failure analysis
Design optimization
Micromechanical devices
Design automation
Fabrication
Testing
Fatigue
Microactuators
Gold
Performance evaluation
Design optimization
Micromechanical devices
Design automation
Fabrication
Testing
Fatigue
Microactuators
Gold
Performance evaluation
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
This work considers the reliability of surface microfabricated structures and particularly the dynamic response of structural layers during operations, in order to develop a statistical modelling of failure mechanisms for ...
Lire la suite >This work considers the reliability of surface microfabricated structures and particularly the dynamic response of structural layers during operations, in order to develop a statistical modelling of failure mechanisms for micro-actuator. In situ test benches have been designed and fabricated allowing to applied elementary solicitations (traction, bending and torsion) to representative samples. Gold, in situ doped polysilicon and polysilicon doped by diffusion are used as structural layers. These devices are useful to study the fatigue phenomenon. Characterization and fatigue tests have been performed in a vacuum chamber under different environmental and stimuli conditions. Moreover, a theoretical analysis using Finite Elements Method has been achievedLire moins >
Lire la suite >This work considers the reliability of surface microfabricated structures and particularly the dynamic response of structural layers during operations, in order to develop a statistical modelling of failure mechanisms for micro-actuator. In situ test benches have been designed and fabricated allowing to applied elementary solicitations (traction, bending and torsion) to representative samples. Gold, in situ doped polysilicon and polysilicon doped by diffusion are used as structural layers. These devices are useful to study the fatigue phenomenon. Characterization and fatigue tests have been performed in a vacuum chamber under different environmental and stimuli conditions. Moreover, a theoretical analysis using Finite Elements Method has been achievedLire moins >
Langue :
Anglais
Comité de lecture :
Oui
Audience :
Non spécifiée
Vulgarisation :
Non
Source :