Fabrication and characterization of 1.1 ...
Document type :
Article dans une revue scientifique
DOI :
Title :
Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator
Author(s) :
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Journal title :
Applied Physics Letters
Pages :
213104-1-3
Publisher :
American Institute of Physics
Publication date :
2005
ISSN :
0003-6951
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
An electromechanical resonator based on a blade geometry is proposed in this letter. This particular geometry allows self-alignment of the mechanical resonator structure to its lateral electrodes while achieving high ...
Show more >An electromechanical resonator based on a blade geometry is proposed in this letter. This particular geometry allows self-alignment of the mechanical resonator structure to its lateral electrodes while achieving high eigenfrequencies in the GHz range. This letter reports both the fabrication process of the device and measurements in order to extract its mechanical response according to a lateral flexural solicitation. A mixing setup characterization is performed in order to suppress direct capacitive coupling feedthrough from the output current measurement and enable the effective quality factor extraction.This work was supported by the European Union under Contract No. IST-1999-10945. The authors would like to thank S. Lepillet and D. Ducatteau for their valuable help during the devices characterization, and in the same way the IEMN Process Team, for their assistance in the fabrication process.Show less >
Show more >An electromechanical resonator based on a blade geometry is proposed in this letter. This particular geometry allows self-alignment of the mechanical resonator structure to its lateral electrodes while achieving high eigenfrequencies in the GHz range. This letter reports both the fabrication process of the device and measurements in order to extract its mechanical response according to a lateral flexural solicitation. A mixing setup characterization is performed in order to suppress direct capacitive coupling feedthrough from the output current measurement and enable the effective quality factor extraction.This work was supported by the European Union under Contract No. IST-1999-10945. The authors would like to thank S. Lepillet and D. Ducatteau for their valuable help during the devices characterization, and in the same way the IEMN Process Team, for their assistance in the fabrication process.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :