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Resolution Improvement Method for ...
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Document type :
Communication dans un congrès avec actes
DOI :
10.23919/EuMC.2018.8541554
Title :
Resolution Improvement Method for Non-Destructive Imaging with Near-Field Scanning Microwave Microscopy
Author(s) :
Lin, Tianjun [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Gu, S. [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lasri, T. [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
48th European Microwave Conference, EuMC 2018
City :
Madrid
Country :
Espagne
Start date of the conference :
2018-09-25
Publisher :
Institute of Electrical and Electronics Engineers Inc.
Publication date :
2018
English keyword(s) :
adaptive and robust statistical method
near-field scanning microwave microscopy
position/signal difference method
spatial resolution
subsurface imaging
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
In this paper we report a resolution enhancement method for non-destructive imaging application with near-field scanning microwave microscopy (NFMM). The technique proposed for the image processing is based on the combination ...
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In this paper we report a resolution enhancement method for non-destructive imaging application with near-field scanning microwave microscopy (NFMM). The technique proposed for the image processing is based on the combination of the position/signal difference (PSD) method and an adaptive robust statistical (ARS) method. The NFMM, is built up with a vector network analyzer (VNA), an evanescent microwave probe (EMP), a high resolution motorized XYZ stage, and a data acquisition system. Thanks to the broadband matching network based on an interferometric technique, the electromagnetic coupling between the probe and sample can be adjusted to guarantee a high measurement sensitivity at any frequency from 2 to 18 GHz. Experimental results demonstrate that the proposed resolution enhancement solution can effectively correct the distortion caused by multiple parameters such as measurement noise and tilt errors of the sample. The post-processing technique associated to the microwave instrumentation result in an improvement of spatial resolution for non-destructive evaluation. © 2018 European Microwave Association.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
Collections :
  • Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520
Source :
Harvested from HAL
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