Title :

Resolution Improvement Method for Non-Destructive Imaging with Near-Field Scanning Microwave Microscopy

Author(s) :

Lin, Tianjun [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Gu, S. [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lasri, T. [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Conference title :

48th European Microwave Conference, EuMC 2018

City :

Madrid

Country :

Espagne

Start date of the conference :

2018-09-25

Publisher :

Institute of Electrical and Electronics Engineers Inc.

Publication date :

2018

English keyword(s) :

adaptive and robust statistical method
near-field scanning microwave microscopy
position/signal difference method
spatial resolution
subsurface imaging

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

In this paper we report a resolution enhancement method for non-destructive imaging application with near-field scanning microwave microscopy (NFMM). The technique proposed for the image processing is based on the combination ...
Show more >In this paper we report a resolution enhancement method for non-destructive imaging application with near-field scanning microwave microscopy (NFMM). The technique proposed for the image processing is based on the combination of the position/signal difference (PSD) method and an adaptive robust statistical (ARS) method. The NFMM, is built up with a vector network analyzer (VNA), an evanescent microwave probe (EMP), a high resolution motorized XYZ stage, and a data acquisition system. Thanks to the broadband matching network based on an interferometric technique, the electromagnetic coupling between the probe and sample can be adjusted to guarantee a high measurement sensitivity at any frequency from 2 to 18 GHz. Experimental results demonstrate that the proposed resolution enhancement solution can effectively correct the distortion caused by multiple parameters such as measurement noise and tilt errors of the sample. The post-processing technique associated to the microwave instrumentation result in an improvement of spatial resolution for non-destructive evaluation. © 2018 European Microwave Association.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL