Titre :

Resolution Improvement Method for Non-Destructive Imaging with Near-Field Scanning Microwave Microscopy

Auteur(s) :

Lin, Tianjun [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Gu, S. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Lasri, T. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]

Titre de la manifestation scientifique :

48th European Microwave Conference, EuMC 2018

Ville :

Madrid

Pays :

Espagne

Date de début de la manifestation scientifique :

2018-09-25

Éditeur :

Institute of Electrical and Electronics Engineers Inc.

Date de publication :

2018

Mot(s)-clé(s) en anglais :

adaptive and robust statistical method
near-field scanning microwave microscopy
position/signal difference method
spatial resolution
subsurface imaging

Discipline(s) HAL :

Sciences de l'ingénieur [physics]

Résumé en anglais : [en]

In this paper we report a resolution enhancement method for non-destructive imaging application with near-field scanning microwave microscopy (NFMM). The technique proposed for the image processing is based on the combination ...
Lire la suite >In this paper we report a resolution enhancement method for non-destructive imaging application with near-field scanning microwave microscopy (NFMM). The technique proposed for the image processing is based on the combination of the position/signal difference (PSD) method and an adaptive robust statistical (ARS) method. The NFMM, is built up with a vector network analyzer (VNA), an evanescent microwave probe (EMP), a high resolution motorized XYZ stage, and a data acquisition system. Thanks to the broadband matching network based on an interferometric technique, the electromagnetic coupling between the probe and sample can be adjusted to guarantee a high measurement sensitivity at any frequency from 2 to 18 GHz. Experimental results demonstrate that the proposed resolution enhancement solution can effectively correct the distortion caused by multiple parameters such as measurement noise and tilt errors of the sample. The post-processing technique associated to the microwave instrumentation result in an improvement of spatial resolution for non-destructive evaluation. © 2018 European Microwave Association.Lire moins >

Langue :

Anglais

Comité de lecture :

Oui

Audience :

Internationale

Vulgarisation :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL