Title :

Spatial resolution enhancement of near field microwave microscope

Author(s) :

Gu, S. [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lin, Tianjun [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lasri, T. [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Conference title :

46th European Microwave Conference, EuMC 2016

City :

London

Country :

Royaume-Uni

Start date of the conference :

2016-10-04

Publisher :

Institute of Electrical and Electronics Engineers Inc.

Publication date :

2016

English keyword(s) :

2D imaging
Evanescent microwave probe
Near-field scanning microwave microscope
Spatial resolution

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

A near-field scanning microwave microscope based on an interferometric technique is proposed in this work. To ensure an optimal spatial resolution, crucial parameters of the evanescent microwave probe are finely studied ...
Show more >A near-field scanning microwave microscope based on an interferometric technique is proposed in this work. To ensure an optimal spatial resolution, crucial parameters of the evanescent microwave probe are finely studied including the tip apex, the stand-off distance and the scanning step size. © 2016 EuMA.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL