Title :

3D LiMn₂O₄ Thin Film Deposited by ALD: A Road toward High‐Capacity Electrode for 3D Li‐Ion Microbatteries

Author(s) :

Hallot, Maxime [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Nikitin, Viktor [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Lebedev, Oleg [Auteur]
Laboratoire de cristallographie et sciences des matériaux [CRISMAT]
Retoux, Richard [Auteur]
Laboratoire de cristallographie et sciences des matériaux [CRISMAT]
Troadec, david [Auteur]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
de Andrade, Vincent [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Roussel, Pascal [Auteur]
Unité de Catalyse et Chimie du Solide - UMR 8181 [UCCS]
Lethien, Christophe [Auteur]
Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN ]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Journal title :

Small

Pages :

2107054

Publisher :

Wiley-VCH Verlag

Publication date :

2022-04-07

ISSN :

1613-6810

English keyword(s) :

3D Li-ion microbatteries
LiMn 2O 4
Atomic layer deposition
High capacity electrodes
Thin films

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

Miniaturized electronics suffer from a lack of energy autonomy. In that context, the fabrication of lithium-ion solid-state microbatteries with high performance is mandatory for powering the next generation of portable ...
Show more >Miniaturized electronics suffer from a lack of energy autonomy. In that context, the fabrication of lithium-ion solid-state microbatteries with high performance is mandatory for powering the next generation of portable electronic devices. Here, the fabrication of a thin film positive electrode for 3D Li-ion microbatteries made by the atomic layer deposition (ALD) method and in situ lithiation step is demonstrated. The 3D electrodes based on spinel LiMn2 O4 films operate at high working potential (4.1 V vs Li/Li+ ) and are capable of delivering a remarkable surface capacity (≈180 μAh cm-2 ) at low C-rate while maintaining more than 40 μAh cm-2 at C/2 (time constant = 2 h). Both the thickness of the electrode material and the 3D gain of the template are carefully tuned to maximize the electrode performance. Advanced characterization techniques such as transmission electron and X-ray transmission microscopies are proposed as perfect tools to study the conformality of the deposited films and the interfaces between each layer: no interdiffusion or segregation are observed. This work represents a major issue towards the fabrication of 3D-lithiated electrode by ALD-without any prelithiation step by electrochemical technique-making it an attractive solution for the fabrication of 3D Li-ion solid-state microbatteries with semiconductor processing methods.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

ANR Project :

Caractérisations AvancéeS in SItu / OPerando de micro-batteriES 3D tout solide à ions lithium développées en technologie couche mince ALD

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL