Title :

A New Approach to Improve the Control of the Sensitive Layer of Surface Acoustic Wave Gas Sensors Using the Electropolymerization

Author(s) :

Oumekloul, Zakariae [Auteur correspondant]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Pecqueur, Sebastien [Auteur]
Nanostructures, nanoComponents & Molecules - IEMN [NCM - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
de Maistre, Arnaud [Auteur]
Institut Catholique d'Arts et Métiers [ICAM]
Pernod, Philippe [Auteur]
Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN [AIMAN-FILMS - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Laboratoire International associé sur les phénomènes Critiques et Supercritiques en électronique fonctionnelle, acoustique et fluidique [LIA LICS/LEMAC]
Lmimouni, Kamal [Auteur]
Nanostructures, nanoComponents & Molecules - IEMN [NCM - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Talbi, Abdelkrim [Auteur]
Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN [AIMAN-FILMS - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Hafsi, B. [Auteur]
Institut Catholique d'Arts et Métiers [ICAM]
Nanostructures, nanoComponents & Molecules - IEMN [NCM - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Conference title :

2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

City :

Pont-a-Mousson

Country :

France

Start date of the conference :

2022-07-11

Publisher :

IEEE

English keyword(s) :

Surface Acoustic Wave (SAW)
Radio Frequency (RF)
Organic Electrochemical Sensors
Electropolymerization

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

Surface acoustic waves (SAWs) have a broad spectrum of applications, especially in sensing. However, deposition methods of sensitive layers can be controlled locally through electrodeposition unlike other conventional ...
Show more >Surface acoustic waves (SAWs) have a broad spectrum of applications, especially in sensing. However, deposition methods of sensitive layers can be controlled locally through electrodeposition unlike other conventional methods, such as drop-casting and atmospheric-pressure plasma. Employing this method, we experimentally demonstrate the local electrodeposition of PEDOT: PSS on a structured active gold surface. We investigate the response of a piezoelectric transducer at 215MHz, by exploiting shear-horizontal (SH) surface waves of the ST-cut quartz substrate. The sensor responses were then tested under acetone, methanol, isopropanol and water vapor gases. Phase changes were more observed under water vapors gases. These changes depended on the surface conductivity of PEDOT: PSS deposited on the sensor. The double-port SAW gas sensors modified with the PEDOT: PSS presented the highest sensitivity in the case of water vapor, with a maximum phase shift of 0.8° and an insertion loss of about 0.5 dB at room temperature. The obtained results could pave the way to implement advanced designs of high-performance and wireless electroacoustic gas sensors based on electropolymerization.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL