Title :

Switchable SAW Resonators and Ladder Filters Composed of Interdigitated Combs

Author(s) :

Alcorta Galván, R. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Croenne, Charles [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Dubus, Bertrand [Auteur]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Loiseaux, B. [Auteur]
Thales Research and Technology [Palaiseau]
Eustache, E. [Auteur]
Thales Research and Technology [Palaiseau]
Bertrand, M. [Auteur]
Thales Research and Technology [Palaiseau]
Hladky, Anne-Christine [Auteur]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Journal title :

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

Publisher :

Institute of Electrical and Electronics Engineers

Publication date :

2024

ISSN :

0885-3010

English keyword(s) :

Electrical Bragg Bandgap
MEMS
Piezoelectricity
RF resonator
Single-Port SAW resonator
Tunable SAW device

HAL domain(s) :

Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]

English abstract : [en]

This work presents the development of switchable SAW resonators fabricated on a LiNbO3 substrate, which use the Electrical Bragg Bandgap concept to control the resonance frequency. The modification of the electrical condition ...
Show more >This work presents the development of switchable SAW resonators fabricated on a LiNbO3 substrate, which use the Electrical Bragg Bandgap concept to control the resonance frequency. The modification of the electrical condition of electrode arrays shifts their bandgap center frequency which in turn changes the effective cavity length and resonance frequency of the resonator. This method uses the electrodes already present in SAW devices, thus reducing the complexity of potentially tunable SAW components. In this paper, the electrodes which make up the cavity mirrors are connected into IDCP’s (interdigitated comb pairs), reducing the necessary number of switches for operation. Finite Element Method (FEM) simulations are used to analyze resonator operation and design difficulties are discussed. Frozen (with no possibility of switching) and switchable versions of a chosen resonator structure are fabricated to experimentally showcase resonator operation. It is found that it is possible to design switchable SAW resonators which require a single switch and present a relative frequency jump of around 2.3%. Finally frozen single cell and 4-cell ladder filters are fabricated as a proof of concept of a switchable SAW filter.Show less >

Language :

Anglais

Popular science :

Non

ANR Project :

Filtres phOnoniques Radiofréquences MicrO-uSinés Agiles

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL