Title :

Determination of the d31 piezoelectric coefficient of PbZrxTi1−xO3 thin films using multilayer buckled micromembranes

Author(s) :

Ayela, C. [Auteur]
Laboratoire d'analyse et d'architecture des systèmes [LAAS]
Nicu, Liviu [Auteur]
Laboratoire d'analyse et d'architecture des systèmes [LAAS]
Soyer, Caroline [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Cattan, Eric [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Bergaud, C. [Auteur]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]

Journal title :

Journal of Applied Physics

Pages :

054908

Publisher :

American Institute of Physics

Publication date :

2006-09-12

ISSN :

0021-8979

HAL domain(s) :

Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique

English abstract : [en]

The aim of this paper consists in the determination of the piezoelectric transverse coefficient d31 of PbZrxTi1-xO3 (PZT) thin films integrated in dedicated multilayer silicon-based micromembranes exhibiting an initial ...
Show more >The aim of this paper consists in the determination of the piezoelectric transverse coefficient d31 of PbZrxTi1-xO3 (PZT) thin films integrated in dedicated multilayer silicon-based micromembranes exhibiting an initial buckled profile. An analytical model specific to this configuration was built and used for the calculation of d31 starting with the static profiles of the microfabricated devices determined by means of a double-beam interferometer. The influence of dc voltage and buckling effects on the d31 piezoelectric coefficient at the microscale were investigated, and high values were obtained, from 30to75pm/V, within a hysteresyslike cycle. These results demonstrated the good electrical behavior of PZT thin films at the microscale with a low influence of buckling effects and determined optimal operation conditions for high values of d31.Show less >

Language :

Anglais

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL