Title :

Very high aspect ratio hot-wire based MEMS thermal sensor for near wall turbulent flow measurement with high sensitivity and low power consumption
Capteur fil-chaud MEMS à haut rapport d'aspect pour des mesures d'écoulements turbulents en proche paroi, avec une grande sensibilité et un faible consommation d'énergie.

Alternative title :

Capteur fil-chaud MEMS à haut rapport d'aspect pour des mesures d'écoulements turbulents en proche paroi, avec une grande sensibilité et un faible consommation d'énergie.

Author(s) :

Ghouila-Houri, Cécile [Auteur]
ONERA - The French Aerospace Lab [Palaiseau]
Claudel, J. [Auteur]
Gerbedoen, J.C. [Auteur]
Gallas, Q. [Auteur]
ONERA - The French Aerospace Lab [Palaiseau]
Garnier, E. [Auteur]
ONERA - The French Aerospace Lab [Palaiseau]
Merlen, Alain [Auteur]
Viard, R. [Auteur]
Talbi, Abdelkrim [Auteur]
Pernod, Philippe [Auteur]

Keyword(s) :

MEMS
CAPTEUR FIL CHAUD
CAPTEUR FROTTEMENT PARIÉTAL
ANALYSE TURBULENCE

English keyword(s) :

MEMS HOT-WIRE SENSORS
WALL SHEAR-STRESS SENSOR
TURBULENCE ANALYSIS
SEPARATION DETECTION
FLOW CONTROL

HAL domain(s) :

Sciences de l'ingénieur [physics]/Mécanique [physics.med-ph]/Mécanique des fluides [physics.class-ph]

English abstract : [en]

We present an effcient and high-sensitive micro-electro-mechanical system (MEMS) thermal hot-wire based flow sensor for near wall flow measurement. By combining substreate-free wire structure and mechanical support by ...
Show more >We present an effcient and high-sensitive micro-electro-mechanical system (MEMS) thermal hot-wire based flow sensor for near wall flow measurement. By combining substreate-free wire structure and mechanical support by silicon oxide micro-bridges, the sensor wires achieve a very high aspect ratio, superior to 300, with 1 mm long for only 3 µm wide. The sensor is designed for compromising conventional hot-film and hot-wire sensors and to achieve high sensitivity to the near wall flow velocity, fast response time and flow direction detection. The sensor can be mounted flush to the wall for technical application, sush as flow control and separation detection, or for understanding near wall shear flows. We present here the design and micro-fabrication, then electrical and thermal characterizations and finally the first experiments in a turbulent boundary layer wind tunnel.Show less >

Language :

Anglais

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL