A study on millimetre-wave tunable bandpass filter based on polymer cap deflection

Seok, S.; Kim, J.G.; Rolland, Nathalie; Rolland, P.A.

Document type :

Compte-rendu et recension critique d'ouvrage

DOI :

10.3390/mi3010028

Title :

A study on millimetre-wave tunable bandpass filter based on polymer cap deflection

Author(s) :

Seok, S. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Kim, J.G. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Rolland, Nathalie [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Rolland, P.A. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Journal title :

Micromachines

Pages :

28-35

Publisher :

MDPI

Publication date :

2012

ISSN :

2072-666X

English keyword(s) :

BCB polymer
filter
tuning
millimeter-wave

HAL domain(s) :

Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique

English abstract : [en]

This paper presents a new tuning mechanism for millimetre-wave BPF based on deflection of the BCB membrane of BCB packaging cap. A 3-pole parallel-coupled microstrip filter operating at 60 GHz is first implemented on 30 ...
Show more >This paper presents a new tuning mechanism for millimetre-wave BPF based on deflection of the BCB membrane of BCB packaging cap. A 3-pole parallel-coupled microstrip filter operating at 60 GHz is first implemented on 30 µm-thick BCB polymer substrate and then BCB-capped through our new anti-adhesion layer assisted wafer-level transfer technique. Gold electrodes are fabricated on top of the BCB cap for DC actuation. The implemented BCB capped BPF showed the tuning range of 1.49 GHz from 63.36 GHz to 64.85 GHz with the associated insertion losses of −9.7 dB and −9.4 dB and the return losses better than −11 dB over the tuning rangeShow less >

Language :

Anglais

Popular science :

Non

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