AlN on nanocrystalline diamond piezoelectric ...
Document type :
Communication dans un congrès avec actes
Title :
AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators
Author(s) :
Mortet, V. [Auteur]
Soltani, Ali [Auteur]
Talbi, Abdelkrim [Auteur]
Pobedinskas, P. [Auteur]
Haenen, K. [Auteur]
De Jaeger, Jean-Claude [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Pernod, Philippe [Auteur]
Wagner, P. [Auteur]
Soltani, Ali [Auteur]
Talbi, Abdelkrim [Auteur]
Pobedinskas, P. [Auteur]
Haenen, K. [Auteur]
De Jaeger, Jean-Claude [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Pernod, Philippe [Auteur]
Wagner, P. [Auteur]
Conference title :
Eurosensors XXIII
City :
Lausanne
Country :
Suisse
Start date of the conference :
2009-09-06
Journal title :
Procedia Chemistry
Publisher :
_
Publication date :
2009
English keyword(s) :
Nanocrystalline diamand NCD
Piezoelectric AlN
MEMS resonators
Piezoelectric AlN
MEMS resonators
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication and characterization of piezoelectrically driven nano-crystalline diamond (NCD) cantilevers are reported Diamond films were ...
Show more >Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication and characterization of piezoelectrically driven nano-crystalline diamond (NCD) cantilevers are reported Diamond films were grown on silicon (100) substrates by microwave plasma enhanced chemical vapor deposition (MW-PECVD). Cantilevers are coated by DC pulsed piezoelectric with AlN films that is sandwiched between two metallic electrodes. The thicknesses of AlN and diamond layers are 1μm and 700nm, respectively. The influence on the electromechanical response of cantilevers length was studied. The motion of the electrically driven cantilevers is performed by measuring the evolution of the electrical impedance at the resonant frequencies that varies between 10 kHz and 130 kHz for the resonant mode.Show less >
Show more >Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication and characterization of piezoelectrically driven nano-crystalline diamond (NCD) cantilevers are reported Diamond films were grown on silicon (100) substrates by microwave plasma enhanced chemical vapor deposition (MW-PECVD). Cantilevers are coated by DC pulsed piezoelectric with AlN films that is sandwiched between two metallic electrodes. The thicknesses of AlN and diamond layers are 1μm and 700nm, respectively. The influence on the electromechanical response of cantilevers length was studied. The motion of the electrically driven cantilevers is performed by measuring the evolution of the electrical impedance at the resonant frequencies that varies between 10 kHz and 130 kHz for the resonant mode.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :
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