New developments on IR distribution-patterned ...
Type de document :
Communication dans un congrès avec actes
DOI :
Titre :
New developments on IR distribution-patterned microradiometers family
Auteur(s) :
Leclercq, Didier [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Ziouche, Katir [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Boutchich, Mohamed [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Godts, Pascale [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Ziouche, Katir [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Boutchich, Mohamed [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Godts, Pascale [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Titre de la manifestation scientifique :
SPIE 15th Annual International Symposium on Aerospace/Defense Sensing, Simulation and Controls, Infrared Technology and Applications, AeroSense 2001
Ville :
Orlando
Pays :
Etats-Unis d'Amérique
Date de début de la manifestation scientifique :
2001-04-16
Titre de l’ouvrage :
Proceedings of the SPIE - International Society for Optical Engineering, 4369
Éditeur :
SPIE – The International Society for Optical Engineering, Bellingham, WA, USA
Date de publication :
2001
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
In this paper the last results obtained in the field of design and realization of planar infrared microsensors are presented. These sensors can be considered as a pattern of cells electrically serialized. For each cell, ...
Lire la suite >In this paper the last results obtained in the field of design and realization of planar infrared microsensors are presented. These sensors can be considered as a pattern of cells electrically serialized. For each cell, the incident radiation is converted into heat transfer by way of alternatively absorbent and reflecting areas. The center of each area is crossed with a thin microthermocouple whose hot and cold junctions are submitted to the superficial thermal field. By using micromachining, cell dimensions can be shrinked and 5 X 5 cm2 microsensors have been manufactured with more than 3000 cells. KaptonTM is used as substrate and a liquid resin polyimide intended to constitute the infrared absorbing layer. To determine the intrinsic absorption spectrum of this resin, processing a membrane of some cm2 was needed. In this case, the spectral transmittance of this membrane was measured with an infrared spectrometer (Perkin - Elmer) and absorptivity can be mathematically deduced. The sensitivity represented by the ratio between the voltage delivered by the sensor and the absorptive heat flux is calculated by the way of a monodimensional analytical model dependent on a parameter representing the penetration depth of heat in the monolithic substrate. This parameter is computed from 2D finite elements modeling and takes into account the geometrical characteristics of each basic cell constituting the sensor. Finally, by multiplying the absorption spectrum with the sensitivity, the curves of sensors spectral sensitivities in the range 5 - 20 μm can be deducedLire moins >
Lire la suite >In this paper the last results obtained in the field of design and realization of planar infrared microsensors are presented. These sensors can be considered as a pattern of cells electrically serialized. For each cell, the incident radiation is converted into heat transfer by way of alternatively absorbent and reflecting areas. The center of each area is crossed with a thin microthermocouple whose hot and cold junctions are submitted to the superficial thermal field. By using micromachining, cell dimensions can be shrinked and 5 X 5 cm2 microsensors have been manufactured with more than 3000 cells. KaptonTM is used as substrate and a liquid resin polyimide intended to constitute the infrared absorbing layer. To determine the intrinsic absorption spectrum of this resin, processing a membrane of some cm2 was needed. In this case, the spectral transmittance of this membrane was measured with an infrared spectrometer (Perkin - Elmer) and absorptivity can be mathematically deduced. The sensitivity represented by the ratio between the voltage delivered by the sensor and the absorptive heat flux is calculated by the way of a monodimensional analytical model dependent on a parameter representing the penetration depth of heat in the monolithic substrate. This parameter is computed from 2D finite elements modeling and takes into account the geometrical characteristics of each basic cell constituting the sensor. Finally, by multiplying the absorption spectrum with the sensitivity, the curves of sensors spectral sensitivities in the range 5 - 20 μm can be deducedLire moins >
Langue :
Anglais
Comité de lecture :
Oui
Audience :
Internationale
Vulgarisation :
Non
Source :