Title :

Acoustic microscopy measurement of elastic constants by using an optimization method on measured and calculated SAW velocities : effect of initial Cij values on the calculation convergence and influence of the LFI transducer parameters on the determination of the SAW velocity

Author(s) :

Lematre, Michael [Auteur]
École des Mines de Douai [Mines Douai EMD]
Benmehrez, Youssef [Auteur]
École des Mines de Douai [Mines Douai EMD]
Bourse, G. [Auteur]
École des Mines de Douai [Mines Douai EMD]
Xu, Wei Jiang [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Ourak, Mohamed [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Journal title :

NDT & E International

Pages :

279-286

Publisher :

Elsevier

Publication date :

2002

ISSN :

0963-8695

English keyword(s) :

Line-focus acoustic microscopy
Anisotropic solids
Surface acoustic wave velocity
Elastic constants
Simplex method

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

The determination of elastic constants in anisotropic solids by line-focus acoustic microscopy (LFAM) is discussed. The velocity of leaky surface acoustic waves (SAWs) has been obtained for different directions of propagation ...
Show more >The determination of elastic constants in anisotropic solids by line-focus acoustic microscopy (LFAM) is discussed. The velocity of leaky surface acoustic waves (SAWs) has been obtained for different directions of propagation (φ) from the V(z) curves. The elastic constants are determined from the comparison of measured and calculated velocities. The principle is based on the minimization of the summation of the square difference ∑|VΦc−VΦm|2, by using a Simplex method. This paper deals with the case of cubic-crystallite solids defined by three independent elastic constants. The influence of the initial values of cij on the final result is discussed in the case of MgO substrate and TiN deposited on MgO substrate. Experimental SAW velocity profile is measured on (100) silicon substrate as a function of φ between [100] and [010] directions. The influence of the transducer parameters and defocusing distance are also discussed.Show less >

Language :

Anglais

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL