Title :

Process and realization of a three dimensional gold electroplated antenna on a flexible epoxy film for wireless micromotion system

Author(s) :

Basset, Philippe [Auteur]
Electronique, Systèmes de communication et Microsystèmes [ESYCOM]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Kaiser, Andreas [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Journal title :

Journal of Vacuum Science and Technology

Pages :

1465-1470

Publisher :

American Vacuum Society (AVS)

Publication date :

2002

ISSN :

0022-5355

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

The process and realization of a light and low resistive antenna for wireless communications by inductive coupling at 13.56 MHz is presented. The antenna is realized on an insulated substrate made of SU-8 resist in order ...
Show more >The process and realization of a light and low resistive antenna for wireless communications by inductive coupling at 13.56 MHz is presented. The antenna is realized on an insulated substrate made of SU-8 resist in order to prevent the losses due to eddy currents from occurring and to strongly decrease its weight. The conductor is obtained by electroplating 24 μm of gold in a mold of AZ-4562 resist. A Q factor of 29 has been obtained with a maximum of 37 at 19 MHz, for antenna dimensions of 1.5×1.5 cm2. This antenna is the key component for a wireless power supplied microrobot.Show less >

Language :

Anglais

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL