Modeling of failure mechanisms for optimized ...
Document type :
Communication dans un congrès avec actes
Title :
Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches
Author(s) :
Millet, Olivier [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
12th International Conference on Solid-State Sensors
City :
Boston
Country :
Etats-Unis d'Amérique
Start date of the conference :
2003-06-08
Book title :
Proceedings of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03
Publisher :
IEEE, Piscataway, NJ, USA
Publication date :
2003
English keyword(s) :
Failure analysis
Design optimization
Micromechanical devices
Design automation
Fabrication
Testing
Fatigue
Microactuators
Gold
Performance evaluation
Design optimization
Micromechanical devices
Design automation
Fabrication
Testing
Fatigue
Microactuators
Gold
Performance evaluation
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
This work considers the reliability of surface microfabricated structures and particularly the dynamic response of structural layers during operations, in order to develop a statistical modelling of failure mechanisms for ...
Show more >This work considers the reliability of surface microfabricated structures and particularly the dynamic response of structural layers during operations, in order to develop a statistical modelling of failure mechanisms for micro-actuator. In situ test benches have been designed and fabricated allowing to applied elementary solicitations (traction, bending and torsion) to representative samples. Gold, in situ doped polysilicon and polysilicon doped by diffusion are used as structural layers. These devices are useful to study the fatigue phenomenon. Characterization and fatigue tests have been performed in a vacuum chamber under different environmental and stimuli conditions. Moreover, a theoretical analysis using Finite Elements Method has been achievedShow less >
Show more >This work considers the reliability of surface microfabricated structures and particularly the dynamic response of structural layers during operations, in order to develop a statistical modelling of failure mechanisms for micro-actuator. In situ test benches have been designed and fabricated allowing to applied elementary solicitations (traction, bending and torsion) to representative samples. Gold, in situ doped polysilicon and polysilicon doped by diffusion are used as structural layers. These devices are useful to study the fatigue phenomenon. Characterization and fatigue tests have been performed in a vacuum chamber under different environmental and stimuli conditions. Moreover, a theoretical analysis using Finite Elements Method has been achievedShow less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :