Stability and pull-in voltage of electrostatic ...
Document type :
Compte-rendu et recension critique d'ouvrage
Title :
Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions
Author(s) :
Rollier, Anne-Sophie [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Journal title :
Journal of Micromechanics and Microengineering
Pages :
794-801
Publisher :
IOP Publishing
Publication date :
2006
ISSN :
0960-1317
HAL domain(s) :
Physique [physics]
English abstract : [en]
This paper deals with parallel-plate electrostatic actuators in liquids. We study the stability conditions of such actuators and show that the pull-in effect can be shifted beyond one-third of the gap, and can even be ...
Show more >This paper deals with parallel-plate electrostatic actuators in liquids. We study the stability conditions of such actuators and show that the pull-in effect can be shifted beyond one-third of the gap, and can even be suppressed. We demonstrate that the insulating layers of the actuator plates, which are originally designed to avoid any current leakages or short-circuits, play a major role in this phenomenon. Experiments are performed on fabricated devices; silicon nitride layers are used to completely encapsulate the actuator plates. The voltages required to close the actuator gap are measured in various liquids and compared to the values obtained by analytical calculations. This study gives guidelines for the design of parallel-plate actuators featuring in liquids either a binary-state operation when the pull-in effect occurs, or a continuous displacement within the full gap.Show less >
Show more >This paper deals with parallel-plate electrostatic actuators in liquids. We study the stability conditions of such actuators and show that the pull-in effect can be shifted beyond one-third of the gap, and can even be suppressed. We demonstrate that the insulating layers of the actuator plates, which are originally designed to avoid any current leakages or short-circuits, play a major role in this phenomenon. Experiments are performed on fabricated devices; silicon nitride layers are used to completely encapsulate the actuator plates. The voltages required to close the actuator gap are measured in various liquids and compared to the values obtained by analytical calculations. This study gives guidelines for the design of parallel-plate actuators featuring in liquids either a binary-state operation when the pull-in effect occurs, or a continuous displacement within the full gap.Show less >
Language :
Anglais
Popular science :
Non
Source :
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