Suppression of the pull-in instability for ...
Document type :
Compte-rendu et recension critique d'ouvrage
DOI :
Title :
Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids
Author(s) :
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Rollier, Anne-Sophie [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Rollier, Anne-Sophie [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Journal title :
Applied Physics Letters
Pages :
034105-1-3
Publisher :
American Institute of Physics
Publication date :
2006
ISSN :
0003-6951
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
We study electrostatic parallel-plate actuators operated in dielectric liquids. The stable operation zone of the actuators in common liquids is extended far beyond one-third of the initial gap, which is the typical limit ...
Show more >We study electrostatic parallel-plate actuators operated in dielectric liquids. The stable operation zone of the actuators in common liquids is extended far beyond one-third of the initial gap, which is the typical limit of stability for such actuators operated in air. The pull-in effect can even be totally suppressed. In spite of higher dielectric constants in liquids than in air, which is expected to magnify the electrostatic forces, the required voltages to actuate are not significantly reduced and may even be larger. These results are discussed with regard to the dielectric constant of the liquids and to the electrical insulating layers of the parallel plates which appear to play a major role. Finally, the analytical approach is compared to experiments performed on fabricated devices.Show less >
Show more >We study electrostatic parallel-plate actuators operated in dielectric liquids. The stable operation zone of the actuators in common liquids is extended far beyond one-third of the initial gap, which is the typical limit of stability for such actuators operated in air. The pull-in effect can even be totally suppressed. In spite of higher dielectric constants in liquids than in air, which is expected to magnify the electrostatic forces, the required voltages to actuate are not significantly reduced and may even be larger. These results are discussed with regard to the dielectric constant of the liquids and to the electrical insulating layers of the parallel plates which appear to play a major role. Finally, the analytical approach is compared to experiments performed on fabricated devices.Show less >
Language :
Anglais
Popular science :
Non
Source :
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