RF blade nano-electromechanical resonator ...
Type de document :
Communication dans un congrès avec actes
Titre :
RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers
Auteur(s) :
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Titre de la manifestation scientifique :
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005
Ville :
Montreux
Pays :
Suisse
Date de début de la manifestation scientifique :
2005
Titre de l’ouvrage :
Proceedings of the 2005 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005
Éditeur :
IEEE, Piscataway, NJ, USA
Date de publication :
2005
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator ...
Lire la suite >In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while achieving high eigenfrequencies in the GHz range for lateral flexural solicitation. Using an electromechanical amplitude modulation setup, a fundamental resonance frequency at 1.12 GHz has been extracted with a quality factor of 180, and its first harmonic has been measured at 2.5 GHz associated with a quality factor of 62Lire moins >
Lire la suite >In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while achieving high eigenfrequencies in the GHz range for lateral flexural solicitation. Using an electromechanical amplitude modulation setup, a fundamental resonance frequency at 1.12 GHz has been extracted with a quality factor of 180, and its first harmonic has been measured at 2.5 GHz associated with a quality factor of 62Lire moins >
Langue :
Anglais
Comité de lecture :
Oui
Audience :
Non spécifiée
Vulgarisation :
Non
Source :