Characterization of vertical vibration of ...
Document type :
Communication dans un congrès avec actes
Title :
Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode
Author(s) :
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Nakamura, K. [Auteur]
Kawakatsu, H. [Auteur]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Toshiyoshi, Hiroshi [Auteur]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Nakamura, K. [Auteur]
Kawakatsu, H. [Auteur]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Toshiyoshi, Hiroshi [Auteur]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Conference title :
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005
City :
Seoul
Country :
Corée du Sud
Start date of the conference :
2005-06-05
Book title :
Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'05
Publisher :
IEEE, Piscataway, NJ, USA
Publication date :
2005
English keyword(s) :
Atomic force microscopy
Vibrations
Resonant frequency
Dynamic voltage scaling
Electrostatics
Transducers
Amplitude estimation
Motion estimation
Oscillators
Resonator filters
Vibrations
Resonant frequency
Dynamic voltage scaling
Electrostatics
Transducers
Amplitude estimation
Motion estimation
Oscillators
Resonator filters
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic ...
Show more >Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic transducers. Non contact mode is rather used than contact mode in order to alleviate the dynamic mechanical coupling between the resonator and the cantilever occurring in the second case. Moreover, with this technique, sub-nanometer scale mechanical vibrations are sensed at operation frequencies in the MHz range. Additionally, this method is suitable in order to estimate the amplitude of vibrations of the resonator according to its excitation level signal and predict the motional resistance of the resonator, key parameter in case it would be integrated as a reference oscillator or a microelectromechanical filter in a more complex radio-frequency transceiver architectureShow less >
Show more >Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic transducers. Non contact mode is rather used than contact mode in order to alleviate the dynamic mechanical coupling between the resonator and the cantilever occurring in the second case. Moreover, with this technique, sub-nanometer scale mechanical vibrations are sensed at operation frequencies in the MHz range. Additionally, this method is suitable in order to estimate the amplitude of vibrations of the resonator according to its excitation level signal and predict the motional resistance of the resonator, key parameter in case it would be integrated as a reference oscillator or a microelectromechanical filter in a more complex radio-frequency transceiver architectureShow less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :