Towards the 3-D Microfabrication and ...
Document type :
Compte-rendu et recension critique d'ouvrage
DOI :
Title :
Towards the 3-D Microfabrication and Integration of a Complete Power Unit Used for Energy Autonomous Wireless System
Author(s) :
Pichonat, Tristan [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lethien, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Hourlier, Djamila [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Tiercelin, Nicolas [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Troadec, david [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Rolland, Paul Alain [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lethien, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Hourlier, Djamila [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Tiercelin, Nicolas [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Troadec, david [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Rolland, Paul Alain [Auteur]
Journal title :
ECS Transactions
Pages :
11 - 21
Publisher :
Electrochemical Society, Inc.
Publication date :
2010
ISSN :
1938-5862
HAL domain(s) :
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]
Sciences de l'ingénieur [physics]
English abstract : [en]
This paper deals with the fabrication of an all-solid lithium-ion microbattery for autonomous wireless sensors networks nodes, focusing especially on the solid electrolyte and the negative electrode made of silicon nanowires. ...
Show more >This paper deals with the fabrication of an all-solid lithium-ion microbattery for autonomous wireless sensors networks nodes, focusing especially on the solid electrolyte and the negative electrode made of silicon nanowires. Regarding the electrolyte, amorphous thin solid films of lithium phosphorus oxynitride (LiPON) were prepared by radio-frequency sputtering of a mixture target of P 2 O 5-Li 2 O in ambient nitrogen atmosphere. The morphology, composition, and ionic conductivity were characterized by X-ray diffraction, energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, and A.C. impedance spectroscopy. A microstructuring process is proposed, including a double masking with silicon oxide and silicon nitride layers. Finally, the combination of silicon nanowires and LiPON is presented.Show less >
Show more >This paper deals with the fabrication of an all-solid lithium-ion microbattery for autonomous wireless sensors networks nodes, focusing especially on the solid electrolyte and the negative electrode made of silicon nanowires. Regarding the electrolyte, amorphous thin solid films of lithium phosphorus oxynitride (LiPON) were prepared by radio-frequency sputtering of a mixture target of P 2 O 5-Li 2 O in ambient nitrogen atmosphere. The morphology, composition, and ionic conductivity were characterized by X-ray diffraction, energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, and A.C. impedance spectroscopy. A microstructuring process is proposed, including a double masking with silicon oxide and silicon nitride layers. Finally, the combination of silicon nanowires and LiPON is presented.Show less >
Language :
Anglais
Popular science :
Non
Source :
Files
- https://hal.archives-ouvertes.fr/hal-03192890/document
- Open access
- Access the document
- https://hal.archives-ouvertes.fr/hal-03192890/document
- Open access
- Access the document
- https://hal.archives-ouvertes.fr/hal-03192890/document
- Open access
- Access the document
- document
- Open access
- Access the document
- Pichonat_ECSTrans2010_HAL.pdf
- Open access
- Access the document
- Pichonat_ECSTrans2010_HAL.pdf
- Open access
- Access the document