Passivation of miniature microwave coplanar ...
Document type :
Compte-rendu et recension critique d'ouvrage
Title :
Passivation of miniature microwave coplanar waveguides using a thin film fluoropolymer electret
Author(s) :
Marzouk, Jaouad [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Avramovic, Vanessa [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Guérin, David [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Arscott, Steve [Auteur correspondant]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Avramovic, Vanessa [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Guérin, David [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Arscott, Steve [Auteur correspondant]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Journal title :
Scientific Reports
Publisher :
Nature Publishing Group
Publication date :
2021-12-16
ISSN :
2045-2322
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
The insertion losses of miniature gold/silicon-on-insulator (SOI) coplanar waveguides (CPW) are rendered low, stable, and light insensitive when covered with a thin film (95 nm) fluoropolymer deposited by a trifluoromethane ...
Show more >The insertion losses of miniature gold/silicon-on-insulator (SOI) coplanar waveguides (CPW) are rendered low, stable, and light insensitive when covered with a thin film (95 nm) fluoropolymer deposited by a trifluoromethane (CHF 3) plasma. Microwave characterization (0-50 GHz) of the CPWs indicates that the fluoropolymer stabilizes a hydrogen-passivated silicon surface between the CPW tracks. The hydrophobic nature of the fluoropolymer acts as a humidity barrier, meaning that the underlying intertrack silicon surfaces do not re-oxidize over time-something that is known to increase losses. In addition, the fluoropolymer thin film also renders the CPW insertion losses insensitive to illumination with white light (2400 lx)-something potentially advantageous when using optical microscopy observations during microwave measurements. Capacitance-voltage (CV) measurements of gold/fluoropolymer/silicon metal-insulator-semiconductor (MIS) capacitors indicate that the fluoropolymer is an electret-storing positive charge. The experimental results suggest that the stored positive charge in the fluoropolymer electret and charge trapping influence surface-associated losses in CPW-MIS device modelling supports this. Finally, and on a practical note, the thin fluoropolymer film is easily pierced by commercial microwave probes and does not adhere to them-facilitating the repeatable and reproducible characterization of microwave electronic circuitry passivated by thin fluoropolymer.Show less >
Show more >The insertion losses of miniature gold/silicon-on-insulator (SOI) coplanar waveguides (CPW) are rendered low, stable, and light insensitive when covered with a thin film (95 nm) fluoropolymer deposited by a trifluoromethane (CHF 3) plasma. Microwave characterization (0-50 GHz) of the CPWs indicates that the fluoropolymer stabilizes a hydrogen-passivated silicon surface between the CPW tracks. The hydrophobic nature of the fluoropolymer acts as a humidity barrier, meaning that the underlying intertrack silicon surfaces do not re-oxidize over time-something that is known to increase losses. In addition, the fluoropolymer thin film also renders the CPW insertion losses insensitive to illumination with white light (2400 lx)-something potentially advantageous when using optical microscopy observations during microwave measurements. Capacitance-voltage (CV) measurements of gold/fluoropolymer/silicon metal-insulator-semiconductor (MIS) capacitors indicate that the fluoropolymer is an electret-storing positive charge. The experimental results suggest that the stored positive charge in the fluoropolymer electret and charge trapping influence surface-associated losses in CPW-MIS device modelling supports this. Finally, and on a practical note, the thin fluoropolymer film is easily pierced by commercial microwave probes and does not adhere to them-facilitating the repeatable and reproducible characterization of microwave electronic circuitry passivated by thin fluoropolymer.Show less >
Language :
Anglais
Popular science :
Non
ANR Project :
Source :
Files
- https://hal.archives-ouvertes.fr/hal-03483190/document
- Open access
- Access the document
- https://www.nature.com/articles/s41598-021-03540-0.pdf
- Open access
- Access the document
- https://hal.archives-ouvertes.fr/hal-03483190/document
- Open access
- Access the document
- https://hal.archives-ouvertes.fr/hal-03483190/document
- Open access
- Access the document
- document
- Open access
- Access the document
- Sci_Rep_Nature_2021.pdf
- Open access
- Access the document
- s41598-021-03540-0.pdf
- Open access
- Access the document