Title :

Lithium Niobate Micro-transducers matrix design

Author(s) :

El Rammouz, Hala [Auteur]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
Benmeddour, Farouk [Auteur]
INSA Institut National des Sciences Appliquées Hauts-de-France [INSA Hauts-De-France]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
Assaad, Jamal [Auteur]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
Moulin, Emmanuel [Auteur]
INSA Institut National des Sciences Appliquées Hauts-de-France [INSA Hauts-De-France]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
Dupont, Lucie [Auteur]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
Smagin, Nikolay [Auteur]
Zaatar, Youssef [Auteur]
الجامعة اللبنانية [بيروت] = Lebanese University [Beirut] = Université libanaise [Beyrouth] [LU / ULB]
Herro, Ziad [Auteur]
الجامعة اللبنانية [بيروت] = Lebanese University [Beirut] = Université libanaise [Beyrouth] [LU / ULB]

Scientific editor(s) :

F. Hage Chehade

Conference title :

1st International Conference of Engineering Risk (INCER 2019)

City :

Beyrouth

Country :

Liban

Start date of the conference :

2019-04-03

Book title :

MATEC Web of Conferences

Journal title :

International Conference of Engineering Risk (INCER 2019)

Publisher :

EDP SCIENCES

Publication date :

2019

HAL domain(s) :

Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique

English abstract : [en]

In this work, a two-dimensional (2D) Lithium Niobate (LiNbO 3 ) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These ...
Show more >In this work, a two-dimensional (2D) Lithium Niobate (LiNbO 3 ) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix pattern. In contrary to the one element case, this μTs matrix allows to automatically scan a desired structure in real time. The μTs matrix is characterized using an impedance analyzer. Furthermore, the experimental tests carried out in order to demonstrate the matrix functionality at low frequencies [200 - 800] kHz are presented.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL