[Invited] Picosecond acoustics: from lab to fab
Type de document :
Autre communication scientifique (congrès sans actes - poster - séminaire...): Communication dans un congrès avec actes: Conférence invitée
Titre :
[Invited] Picosecond acoustics: from lab to fab
Auteur(s) :
Devos, Arnaud [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Physique - IEMN [PHYSIQUE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Physique - IEMN [PHYSIQUE - IEMN]
Titre de la manifestation scientifique :
8th International School of Sound and Light, SEL 2022
Ville :
Saint-Pierre d'Oléron
Pays :
France
Date de début de la manifestation scientifique :
2022-09-12
Mot(s)-clé(s) en anglais :
picosecond acoustics
thickness control
thin-film
elasticity
adhesion
RF filters
thickness control
thin-film
elasticity
adhesion
RF filters
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
The main goal of this lecture is to give an outlook of the numerous and various applications that the picosecond acoustic technique has met in the industrial world. The story started a few years after its invention by Prof. ...
Lire la suite >The main goal of this lecture is to give an outlook of the numerous and various applications that the picosecond acoustic technique has met in the industrial world. The story started a few years after its invention by Prof. H. Maris. Indeed, Rudolph Technologies (now ONTO) rapidly realized that such a technique was the missing one in the industrial world for controlling the thickness of thin metal films. That was the beginning of the Metapulse® story, a full automatized tool dedicated to microelectronics applications and that can be found in any production company worthy of the name. More recently, picosecond acoustics and especially its variant based on laser-tuning, the so-called Colored Picosecond Acoustics or APiC, have been shown to be very useful for many other industrial applications in topics as different as space mirror, radio-frequency filtering, flat and smart glass, solar cells,…Lire moins >
Lire la suite >The main goal of this lecture is to give an outlook of the numerous and various applications that the picosecond acoustic technique has met in the industrial world. The story started a few years after its invention by Prof. H. Maris. Indeed, Rudolph Technologies (now ONTO) rapidly realized that such a technique was the missing one in the industrial world for controlling the thickness of thin metal films. That was the beginning of the Metapulse® story, a full automatized tool dedicated to microelectronics applications and that can be found in any production company worthy of the name. More recently, picosecond acoustics and especially its variant based on laser-tuning, the so-called Colored Picosecond Acoustics or APiC, have been shown to be very useful for many other industrial applications in topics as different as space mirror, radio-frequency filtering, flat and smart glass, solar cells,…Lire moins >
Langue :
Anglais
Comité de lecture :
Non
Audience :
Internationale
Vulgarisation :
Non
Source :