Heavily p-Type Doping of Bulk 6H-SiC and ...
Document type :
Article dans une revue scientifique
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Title :
Heavily p-Type Doping of Bulk 6H-SiC and 3C-SiC Grown from Al-Si Melts
Author(s) :
Mercier, Frédéric [Auteur]
Laboratoire des matériaux et du génie physique [LMGP ]
Galben-Sandulache, Irina G. [Auteur]
Laboratoire des matériaux et du génie physique [LMGP ]
Marinova, Maya [Auteur]
Department of Physics [Thessaloniki]
Zoulis, Georgios [Auteur]
Groupe d'étude des semiconducteurs [GES]
Ouisse, Thierry [Auteur]
Laboratoire des matériaux et du génie physique [LMGP ]
Polychroniadis, Efstathios K. [Auteur]
Department of Physics [Thessaloniki]
Chaussende, Didier [Auteur]
Laboratoire des matériaux et du génie physique [LMGP ]
Laboratoire des matériaux et du génie physique [LMGP ]
Galben-Sandulache, Irina G. [Auteur]
Laboratoire des matériaux et du génie physique [LMGP ]
Marinova, Maya [Auteur]

Department of Physics [Thessaloniki]
Zoulis, Georgios [Auteur]
Groupe d'étude des semiconducteurs [GES]
Ouisse, Thierry [Auteur]
Laboratoire des matériaux et du génie physique [LMGP ]
Polychroniadis, Efstathios K. [Auteur]
Department of Physics [Thessaloniki]
Chaussende, Didier [Auteur]
Laboratoire des matériaux et du génie physique [LMGP ]
Journal title :
Materials Science Forum
Volume number :
645-648
Pages :
59-62
Publication date :
2010
ISSN :
1662-9752
English keyword(s) :
Liquid Phase Epitaxy (LPE)
Raman Spectroscopy
TEM
Raman Spectroscopy
TEM
HAL domain(s) :
Chimie/Matériaux
English abstract : [en]
We report in this work, the solution growth of heavily p-type doped 3C-SiC and 6H-SiC. Description of the 3C and 6H-SiC crystals in terms of defects and resistivity are presented and discussed with respect to growth ...
Show more >We report in this work, the solution growth of heavily p-type doped 3C-SiC and 6H-SiC. Description of the 3C and 6H-SiC crystals in terms of defects and resistivity are presented and discussed with respect to growth conditions such as temperature, Al content in the melt and seed polarity. Crystals and thick layers are investigated by means of TEM, NDIC microscopy and Raman.Show less >
Show more >We report in this work, the solution growth of heavily p-type doped 3C-SiC and 6H-SiC. Description of the 3C and 6H-SiC crystals in terms of defects and resistivity are presented and discussed with respect to growth conditions such as temperature, Al content in the melt and seed polarity. Crystals and thick layers are investigated by means of TEM, NDIC microscopy and Raman.Show less >
Language :
Anglais
Audience :
Internationale
Popular science :
Non
Collections :
Submission date :
2019-06-17T08:43:29Z
2020-03-17T16:07:28Z
2020-03-17T16:07:28Z