Switchable SAW Resonators and Ladder Filters ...
Document type :
Compte-rendu et recension critique d'ouvrage
Title :
Switchable SAW Resonators and Ladder Filters Composed of Interdigitated Combs
Author(s) :
Alcorta Galván, R. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Croenne, Charles [Auteur]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Dubus, Bertrand [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Loiseaux, B. [Auteur]
Thales Research and Technology [Palaiseau]
Eustache, E. [Auteur]
Thales Research and Technology [Palaiseau]
Bertrand, M. [Auteur]
Thales Research and Technology [Palaiseau]
Hladky, Anne-Christine [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Croenne, Charles [Auteur]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Dubus, Bertrand [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Loiseaux, B. [Auteur]
Thales Research and Technology [Palaiseau]
Eustache, E. [Auteur]
Thales Research and Technology [Palaiseau]
Bertrand, M. [Auteur]
Thales Research and Technology [Palaiseau]
Hladky, Anne-Christine [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Journal title :
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Publisher :
Institute of Electrical and Electronics Engineers
Publication date :
2024
ISSN :
0885-3010
English keyword(s) :
Electrical Bragg Bandgap
MEMS
Piezoelectricity
RF resonator
Single-Port SAW resonator
Tunable SAW device
MEMS
Piezoelectricity
RF resonator
Single-Port SAW resonator
Tunable SAW device
HAL domain(s) :
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
English abstract : [en]
This work presents the development of switchable SAW resonators fabricated on a LiNbO3 substrate, which use the Electrical Bragg Bandgap concept to control the resonance frequency. The modification of the electrical condition ...
Show more >This work presents the development of switchable SAW resonators fabricated on a LiNbO3 substrate, which use the Electrical Bragg Bandgap concept to control the resonance frequency. The modification of the electrical condition of electrode arrays shifts their bandgap center frequency which in turn changes the effective cavity length and resonance frequency of the resonator. This method uses the electrodes already present in SAW devices, thus reducing the complexity of potentially tunable SAW components. In this paper, the electrodes which make up the cavity mirrors are connected into IDCP’s (interdigitated comb pairs), reducing the necessary number of switches for operation. Finite Element Method (FEM) simulations are used to analyze resonator operation and design difficulties are discussed. Frozen (with no possibility of switching) and switchable versions of a chosen resonator structure are fabricated to experimentally showcase resonator operation. It is found that it is possible to design switchable SAW resonators which require a single switch and present a relative frequency jump of around 2.3%. Finally frozen single cell and 4-cell ladder filters are fabricated as a proof of concept of a switchable SAW filter.Show less >
Show more >This work presents the development of switchable SAW resonators fabricated on a LiNbO3 substrate, which use the Electrical Bragg Bandgap concept to control the resonance frequency. The modification of the electrical condition of electrode arrays shifts their bandgap center frequency which in turn changes the effective cavity length and resonance frequency of the resonator. This method uses the electrodes already present in SAW devices, thus reducing the complexity of potentially tunable SAW components. In this paper, the electrodes which make up the cavity mirrors are connected into IDCP’s (interdigitated comb pairs), reducing the necessary number of switches for operation. Finite Element Method (FEM) simulations are used to analyze resonator operation and design difficulties are discussed. Frozen (with no possibility of switching) and switchable versions of a chosen resonator structure are fabricated to experimentally showcase resonator operation. It is found that it is possible to design switchable SAW resonators which require a single switch and present a relative frequency jump of around 2.3%. Finally frozen single cell and 4-cell ladder filters are fabricated as a proof of concept of a switchable SAW filter.Show less >
Language :
Anglais
Popular science :
Non
ANR Project :
Source :
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