Towards CNC Automation in AFM Probe-Based ...
Document type :
Communication dans un congrès avec actes
Title :
Towards CNC Automation in AFM Probe-Based Nano Machining
Author(s) :
Brousseau, Emmanuel [Auteur]
Cardiff School of Engineering
Arnal, Benoît [Auteur]
Arts et Métiers ParisTech
Thiery, Stéphane [Auteur]
Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
Non-Asymptotic estimation for online systems [NON-A]
Nyiri, Eric [Auteur]
Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
Gibaru, Olivier [Auteur]
Non-Asymptotic estimation for online systems [NON-A]
Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
Mayor, Rhett [Auteur]
Georgia Institute of Technology [Atlanta]
Cardiff School of Engineering
Arnal, Benoît [Auteur]
Arts et Métiers ParisTech
Thiery, Stéphane [Auteur]
Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
Non-Asymptotic estimation for online systems [NON-A]
Nyiri, Eric [Auteur]
Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
Gibaru, Olivier [Auteur]
Non-Asymptotic estimation for online systems [NON-A]
Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
Mayor, Rhett [Auteur]
Georgia Institute of Technology [Atlanta]
Conference title :
8th International Conference on MicroManufacturing (ICOMM 2013)
Country :
Canada
Start date of the conference :
2013-03-25
Publisher :
University of Wisconsin-Madison
Publication date :
2013-03-25
English keyword(s) :
AFM probe-based machining
CAD/CAM
Automation
Nanomanufacturing
CAD/CAM
Automation
Nanomanufacturing
HAL domain(s) :
Mathématiques [math]/Analyse numérique [math.NA]
Informatique [cs]/Ingénierie assistée par ordinateur
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Informatique [cs]/Ingénierie assistée par ordinateur
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
English abstract : [en]
This paper presents a feasibility study, which aims to demonstrate the applicability of the CNC automation philosophy for the process of AFM probe-based nano machining conducted on commercial AFM instruments. In particular, ...
Show more >This paper presents a feasibility study, which aims to demonstrate the applicability of the CNC automation philosophy for the process of AFM probe-based nano machining conducted on commercial AFM instruments. In particular, it is proposed to machine in this way nanostructures generated with any CAD software via the representation of tip path trajectories with G-code instructions. Such a representation can then be interpreted with a post processor at the interface of an AFM instrument. To demonstrate the validity of the proposed approach, it was implemented on a complex pattern. The results obtained open further research perspectives with respect to minimizing the sources of machining errors observed.Show less >
Show more >This paper presents a feasibility study, which aims to demonstrate the applicability of the CNC automation philosophy for the process of AFM probe-based nano machining conducted on commercial AFM instruments. In particular, it is proposed to machine in this way nanostructures generated with any CAD software via the representation of tip path trajectories with G-code instructions. Such a representation can then be interpreted with a post processor at the interface of an AFM instrument. To demonstrate the validity of the proposed approach, it was implemented on a complex pattern. The results obtained open further research perspectives with respect to minimizing the sources of machining errors observed.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
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