Title :

Theoretical and experimental investigation of Lamb waves characteristics in AlN/TiN and AlN/TiN/NCD composite membranes

Author(s) :

Soltani, Ali [Auteur correspondant]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Puissance - IEMN [PUISSANCE - IEMN]
Talbi, Abdelkrim [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN [AIMAN-FILMS - IEMN]
Gerbedoen, J-C [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
De Jaeger, Jean-Claude [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Puissance - IEMN [PUISSANCE - IEMN]
Pernod, Philippe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN [AIMAN-FILMS - IEMN]
Mortet, V. [Auteur]
Institute of Physics of the Czech Academy of Sciences [FZU / CAS]
Bassam, A. [Auteur]
Institut des Matériaux Jean Rouxel [IMN]

Conference title :

IEEE International Ultrasonics Symposium (IUS)

City :

Chicago

Country :

Etats-Unis d'Amérique

Start date of the conference :

2014-09-03

Book title :

IEEE International Ultrasonics Symposium (IUS)

Journal title :

Proceedings of 2014 IEEE International Ultrasonics Symposium, IUS 2014

Publisher :

IEEE

Publication date :

2014

English keyword(s) :

Lamb waves
AlN
TiN
diamond
composite membrane

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

In this study, we present a theoretical and experimental investigations of the zero order quasi-symmetric (S0) Lamb waves mode propagating in AlN/TiN and AlN/TiN/NCD composite membranes. Theoretical analysis of S0 mode ...
Show more >In this study, we present a theoretical and experimental investigations of the zero order quasi-symmetric (S0) Lamb waves mode propagating in AlN/TiN and AlN/TiN/NCD composite membranes. Theoretical analysis of S0 mode characteristics shows that The AlN/TiN membrane enables to achieve smooth dispersion curves, high velocity up to 10000m/s and electromechanical coupling coefficient K-2 up to 3.5%. Thanks to the excellent mechanical properties of the Nano-Crystalline Diamond (NCD), the AlN/TiN/NCD membrane exhibits excellent acoustic wave properties: acoustic wave velocity more than 12000m/s for diamond film thickness less than 1 mu m. An intrinsic K-2 coefficient up to 5% can be reached for in the zone of maximum phase velocity dispersion. These characteristic can be of great interest for sensors applications. From the experimental point of view, a highly oriented c-axis Aluminum Nitride thin films were successfully grown on metallic TiN buffer layer by low temperature sputtering deposition. One important factor in controlling the quality of AlN was the growth of cubic TiN with (111) as preferential crystal orientation. Different acoustic lamb waves devices were fabricated and characterized confirming the very good piezoelectric activity of the AlN. For the case of AlN/TiN/NCD, the addition of the NCD thin films enhances drastically the mechanical toughness of the structure compared to AlN/TiN membrane.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL