Sensitivity and Accuracy Analysis in ...
Document type :
Communication dans un congrès avec actes
Title :
Sensitivity and Accuracy Analysis in Scanning Microwave Microscopy
Author(s) :
Haddadi, Kamel [Auteur]
Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Brillard, Charlene [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Dambrine, Gilles [Auteur]
Advanced NanOmeter DEvices - IEMN [ANODE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Théron, Didier [Auteur]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Brillard, Charlene [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Dambrine, Gilles [Auteur]

Advanced NanOmeter DEvices - IEMN [ANODE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Théron, Didier [Auteur]

Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
IEEE MTT-S International Microwave Symposium, IMS 2016
City :
San Francisco, CA
Country :
Etats-Unis d'Amérique
Start date of the conference :
2016-05-22
Journal title :
Proceedings of 2016 IEEE MTT International Microwave Symposium, IMS 2016
Publication date :
2016
HAL domain(s) :
Sciences de l'ingénieur [physics]
French abstract :
The introduction of scanning microwave microscopy (SMM) tools have pioneered many applications, notably including mapping and quantitative measurement of the electrical properties of materials and devices at micro and nano ...
Show more >The introduction of scanning microwave microscopy (SMM) tools have pioneered many applications, notably including mapping and quantitative measurement of the electrical properties of materials and devices at micro and nano scale. The ability to measure accurately and in a sensitive manner high impedance nanoscale devices is mainly related to the strategy used to match the AFM probe close to the 50 1 impedance of the vector network analyzer (VNA). Different measurement configurations of a homemade interferometric matching network inserted between the AFM probe and the VNA are studied. Measurement sensitivity and accuracy related to nanoscale metal oxide semiconductor (MOS) structures are discussed.Show less >
Show more >The introduction of scanning microwave microscopy (SMM) tools have pioneered many applications, notably including mapping and quantitative measurement of the electrical properties of materials and devices at micro and nano scale. The ability to measure accurately and in a sensitive manner high impedance nanoscale devices is mainly related to the strategy used to match the AFM probe close to the 50 1 impedance of the vector network analyzer (VNA). Different measurement configurations of a homemade interferometric matching network inserted between the AFM probe and the VNA are studied. Measurement sensitivity and accuracy related to nanoscale metal oxide semiconductor (MOS) structures are discussed.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
ANR Project :
Source :