Development of flexible SAW sensors for ...
Document type :
Article dans une revue scientifique: Article original
DOI :
Title :
Development of flexible SAW sensors for non-destructive testing of structure
Author(s) :
Takpara, Rafatou [Auteur]
Laboratoire des Matériaux Céramiques et Procédés Associés - EA 2443 [LMCPA]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Duquennoy, Marc [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Courtois, Christian [Auteur]
Laboratoire des Matériaux Céramiques et Procédés Associés - EA 2443 [LMCPA]
Gonon, Maurice [Auteur]
Université de Mons / University of Mons [UMONS]
Ouaftouch, Mohammadi [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Martic, Gregory [Auteur]
Rguiti, Mohamed [Auteur]
Laboratoire des Matériaux Céramiques et Procédés Associés - EA 2443 [LMCPA]
Jenot, Frederic [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Seronveaux, Laurent [Auteur]
Sirris - Software Engineering & ICT Group
Pelegris, Christine [Auteur]
Laboratoire des technologies innovantes - UR UPJV 3899 [LTI]
Laboratoire des Matériaux Céramiques et Procédés Associés - EA 2443 [LMCPA]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Duquennoy, Marc [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Courtois, Christian [Auteur]
Laboratoire des Matériaux Céramiques et Procédés Associés - EA 2443 [LMCPA]
Gonon, Maurice [Auteur]
Université de Mons / University of Mons [UMONS]
Ouaftouch, Mohammadi [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Martic, Gregory [Auteur]
Rguiti, Mohamed [Auteur]
Laboratoire des Matériaux Céramiques et Procédés Associés - EA 2443 [LMCPA]
Jenot, Frederic [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Seronveaux, Laurent [Auteur]
Sirris - Software Engineering & ICT Group
Pelegris, Christine [Auteur]
Laboratoire des technologies innovantes - UR UPJV 3899 [LTI]
Journal title :
AIP Conference Proceedings
Publisher :
American Institute of Physics
Publication date :
2016-02-10
ISSN :
0094-243X
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
In order to accurately examine structures surfaces, it is interesting to use surface SAW (Surface Acoustic Wave). Such waves are well suited for example to detect early emerging cracks or to test the quality of a coating. ...
Show more >In order to accurately examine structures surfaces, it is interesting to use surface SAW (Surface Acoustic Wave). Such waves are well suited for example to detect early emerging cracks or to test the quality of a coating. In addition, when coatings are thin or when emergent cracks are precocious, it is necessary to excite surface waves beyond 10MHz. Finally, when structures are not flat, it makes sense to have flexible or conformable sensors for their characterization. To address this problem, we propose to develop SAW type of interdigital sensors (or IDT for InterDigital Transducer), based on flexible piezoelectric plates. Initially, in order to optimize these sensors, we modeled the behavior of these sensors and identified the optimum characteristic sizes. In particular, the thickness of the piezoelectric plate and the width of the interdigital electrodes have been studied. Secondly, we made composites based on barium titanate foams in order to have flexible piezoelectric plates and to carry out thereafter sensors. Then, we studied several techniques in order to optimize the interdigitated electrodes deposition on this type of material. One of the difficulties concerns the fineness of these electrodes because the ratio between the length (typically several millimeters) and the width (a few tens of micrometers) of electrodes is very high. Finally, mechanical, electrical and acoustical characterizations of the sensors deposited on aluminum substrates were able to show the quality of our achievement.Show less >
Show more >In order to accurately examine structures surfaces, it is interesting to use surface SAW (Surface Acoustic Wave). Such waves are well suited for example to detect early emerging cracks or to test the quality of a coating. In addition, when coatings are thin or when emergent cracks are precocious, it is necessary to excite surface waves beyond 10MHz. Finally, when structures are not flat, it makes sense to have flexible or conformable sensors for their characterization. To address this problem, we propose to develop SAW type of interdigital sensors (or IDT for InterDigital Transducer), based on flexible piezoelectric plates. Initially, in order to optimize these sensors, we modeled the behavior of these sensors and identified the optimum characteristic sizes. In particular, the thickness of the piezoelectric plate and the width of the interdigital electrodes have been studied. Secondly, we made composites based on barium titanate foams in order to have flexible piezoelectric plates and to carry out thereafter sensors. Then, we studied several techniques in order to optimize the interdigitated electrodes deposition on this type of material. One of the difficulties concerns the fineness of these electrodes because the ratio between the length (typically several millimeters) and the width (a few tens of micrometers) of electrodes is very high. Finally, mechanical, electrical and acoustical characterizations of the sensors deposited on aluminum substrates were able to show the quality of our achievement.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
Source :
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