Titre :

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Auteur(s) :

Elhosni, Meriem [Auteur]
Institut Jean Lamour [IJL]
Elmazria, Omar [Auteur]
Institut Jean Lamour [IJL]
Petit-Watelot, S. [Auteur]
Institut Jean Lamour [IJL]
Bouvot, Laurent [Auteur]
Institut Jean Lamour [IJL]
Zhgoon, Sergei [Auteur]
Talbi, Abdelkrim [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Hehn, Michel [Auteur]
Institut Jean Lamour [IJL]
Aït Aïssa, Keltouma [Auteur]
Institut Jean Lamour [IJL]
Hage-Ali, Sami [Auteur]
Institut Jean Lamour [IJL]
Lacour, Daniel [Auteur]
Institut Jean Lamour [IJL]
Sarry, Frederic [Auteur]
Institut Jean Lamour [IJL]
Bou Matar Lacaze, Olivier [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Titre de la revue :

Sensors and Actuators A: Physical

Pagination :

41 - 49

Éditeur :

Elsevier

Date de publication :

2016-04

ISSN :

0924-4247

Mot(s)-clé(s) en anglais :

SAW
multilayer
FEM Modeling
wireless
magnetic field sensor

Discipline(s) HAL :

Physique [physics]/Physique [physics]
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
Sciences de l'ingénieur [physics]/Matériaux
Sciences de l'ingénieur [physics]/Electronique

Résumé en anglais : [en]

This study describes the numerical implementation of accurate and fully coupled physical models in order to investigate the sensitivity of Surface Acoustic Wave (SAW) devices using the magnetoelas-tic interaction with an ...
Lire la suite >This study describes the numerical implementation of accurate and fully coupled physical models in order to investigate the sensitivity of Surface Acoustic Wave (SAW) devices using the magnetoelas-tic interaction with an external magnetic field. The model was first validated using experimental data previously published by Kadota et al. obtained with SAW resonators based on quartz substrates and nickel Inter Digital Transducers (IDTs). The model was then used to optimize the geometry of a new magnetostrictive-piezoelectric layered structure (Ni/ZnO/IDT/LiNbO 3), regarding its sensitivity to the magnetic field intensity. The optimized structure was designed and fabricated and experimental results show a good correlation with the numerical modeling. Simulations also show that if alumina is used instead of ZnO, the Ni/Al 2 O 3 /IDT/LiNbO 3 structure exhibits a sensitivity that is 9 times higher than the one based on ZnO.Lire moins >

Langue :

Anglais

Vulgarisation :

Non

Projet ANR :

Isite LUE

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL