Title :

High temperature gradient nanogap-Pirani micro-sensor with maximum sensitivity around atmospheric pressure

Author(s) :

Ghouila-Houri, Cécile [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
ONERA - The French Aerospace Lab [Palaiseau]
Talbi, Abdelkrim [Auteur]
Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN [AIMAN-FILMS - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Viard, R. [Auteur]
Moutaouekkil, M. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut Jean Lamour [IJL]
Elmazria, O. [Auteur]
Institut Jean Lamour [IJL]
Gallas, Q. [Auteur]
ONERA - The French Aerospace Lab [Lille]
ONERA - The French Aerospace Lab [Palaiseau]
Garnier, E. [Auteur]
ONERA - The French Aerospace Lab [Meudon]
ONERA - The French Aerospace Lab [Palaiseau]
Merlen, Alain [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
ONERA - The French Aerospace Lab [Palaiseau]
Pernod, Philippe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Journal title :

Applied Physics Letters

Pages :

113502

Publisher :

American Institute of Physics

Publication date :

2017

ISSN :

0003-6951

Keyword(s) :

CAPTEUR PIRANI
CAPTEUR PRESSION MEMS

English keyword(s) :

MEMS pressure sensors
Pirani sensor
Flow control

HAL domain(s) :

Physique [physics]/Physique [physics]/Instrumentations et Détecteurs [physics.ins-det]
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique

English abstract : [en]

This letter describes and discusses the design and testing of an effcient nanogap Pirani micro-sensor for pressure measurements in a wide range with a maximum sensitivity around atmospheric pressure. The structure combines ...
Show more >This letter describes and discusses the design and testing of an effcient nanogap Pirani micro-sensor for pressure measurements in a wide range with a maximum sensitivity around atmospheric pressure. The structure combines a substrate-free heated wire and mechanical support using silicon oxide micro-bridges allowing both a constant nanoscale gap between the wire and the substrate and a 1 mm long and 3 µm wide wire. The high aspect ratio of wire provides a uniform heating profile along the wire and contributes to low pressure detection. At the opposite, both the nanoscale gap and the short wire length between two micro-bridges contributes to shift the high pressure limit. Tested between 10 kPa and 800 kPa, the sensor presents a wide measurement range, not fully reached by the experiments, with a maximum of sensitivity close to the atmospheric pressure and performances with up to 38 %/dec sensitivity when operation in constant temperature mode with an overheat of 20 °C.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL