Spectroscopic study of an Ar-H2O discharge ...
Document type :
Communication dans un congrès avec actes
Title :
Spectroscopic study of an Ar-H2O discharge excited by a RF helical cavity
Author(s) :
Annusova, Adriana [Auteur]
Comenius University in Bratislava
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Krištof, Jaroslav [Auteur]
Comenius University in Bratislava
Veis, Pavel [Auteur]
Comenius University in Bratislava
Foissac, Corinne [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Supiot, Philippe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Comenius University in Bratislava
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Krištof, Jaroslav [Auteur]
Comenius University in Bratislava
Veis, Pavel [Auteur]
Comenius University in Bratislava
Foissac, Corinne [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Supiot, Philippe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
21th Annual Conference of Doctoral Students, WDS 2012
City :
Prague
Country :
République tchèque
Start date of the conference :
2012-05-29
Book title :
Proceedings of 21th Annual Conference of Doctoral Students, WDS 2012
Publication date :
2012
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
This paper deals with a spectroscopic characterization of an Ar-H2O discharge excited by a helical cavity at 27 MHz. The power and the pressure are fixed to 30 W and 266 Pa, respectively. Emissions from Ar, H, O atoms and ...
Show more >This paper deals with a spectroscopic characterization of an Ar-H2O discharge excited by a helical cavity at 27 MHz. The power and the pressure are fixed to 30 W and 266 Pa, respectively. Emissions from Ar, H, O atoms and the OH(A2Σ+→X2Π) molecular spectral system are studied spatially along the discharge as a function of gas composition. Besides, weak emission of the second positive system of N2 coming from impurities is also detected. Conclusions are made about the possible role of argon and nitrogen metastable states in the excitation mechanism of the main emitting species. In addition to this, the characteristic temperatures are determined.Show less >
Show more >This paper deals with a spectroscopic characterization of an Ar-H2O discharge excited by a helical cavity at 27 MHz. The power and the pressure are fixed to 30 W and 266 Pa, respectively. Emissions from Ar, H, O atoms and the OH(A2Σ+→X2Π) molecular spectral system are studied spatially along the discharge as a function of gas composition. Besides, weak emission of the second positive system of N2 coming from impurities is also detected. Conclusions are made about the possible role of argon and nitrogen metastable states in the excitation mechanism of the main emitting species. In addition to this, the characteristic temperatures are determined.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :